Abstract:Si3N4 is difficult to be machined due to its hard and brittle nature. In order to improve its machining quality, a new method of ultrasonic-assisted laser machining is proposed. The machining device is established including Nd: YAG pulsed laser, ultrasonic vibration stage and water flow system. Etching experiments of laser machining with and without sample vibration in anhydrous conditions and in water conditions are studied respectively. A VM-3030E two-dimensional image measuring instrument is applied to dete… Show more
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