Investigation of mechanism and surface morphology on the femtosecond laser ablation of silicon nitride under different auxiliary processing environments

Yu, Xin; Jiang, Liping; Luan, Qiang; Cai, Yukui; Song, Qinghua; Wang, Bing; Wang, Qingqing

doi:10.1016/j.ceramint.2022.12.217

Cited by 9 publications

(5 citation statements)

References 36 publications

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“…When the laser current was 200 A, the frequency was 50 Hz, and the pulse width was 0.6 ms, the groove depth was reduced by 30% and the groove width was increased by 21%. Yu et al [ 19 ] studied the femtosecond laser ablation of silicon nitride in different environments and analyzed the effects of water environments on surface size and morphology. They concluded that when using a low-temperature assisted laser for multi-layer laser ablation, water-constrained laser processing cannot produce significant ablation depths.…”

Section: Introductionmentioning

confidence: 99%

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Wen,

Gao,

Zhang

et al. 2024

Micromachines

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Machining special microstructures on the surface of silicon nitride ceramics helps improve their service performance. However, the high brittleness and low fracture toughness of silicon nitride ceramics make it extremely difficult to machine microstructures on their surface. In this study, a femtosecond laser is used to machine parallel grooved microstructures on the surface of silicon nitride ceramics. The effects of the laser polarization angle, laser single pulse energy, scanning line spacing, and laser scan numbers on the surface morphology and geometric characteristics of grooved microstructures are researched. It is found that a greater angle between the direction of the scanning path and laser polarization is helpful to obtain a smoother surface. As the single pulse energy increases, debris and irregular surface structures will emerge. Increasing the laser scan line spacing leads to clearer and more defined parallel grooved microstructures. The groove depth increases with the increase in the scan numbers. However, when a certain number of scans is reached, the depth will not increase further. This study serves as a valuable research foundation for the femtosecond laser processing of silicon nitride ceramic materials.

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Section: Introductionmentioning

confidence: 99%

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Wen,

Gao,

Zhang

et al. 2024

Micromachines

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“…Among the findings, studies have shown that the depth of laser processing depends on several conditions, including the nature of the material itself and the medium used in the processing [12]. In previous studies, the main focus has been on aqueous environments [13][14][15], ethanol and aqueous environments [16], and liquid isopropanol environments [17], but there are also drawbacks such as excessively high heights that prevent processing or lower heights that exacerbate surface burning.…”

Section: Introductionmentioning

confidence: 99%

“…On the issue of heat accumulation, Yu et al [14] investigated the effect of the underwater environment on the laser ablation of SiC surfaces. It was found that underwater ablation would reduce heat accumulation.…”

Section: Introductionmentioning

confidence: 99%

The Study of Patterns and Mechanisms of Continuous Laser Ablation of Carbon Steel Rust Layers in Multi-Medium Environments

Cui,

Luo,

et al. 2024

Applied Sciences

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A new multi-scenario, low-cost, high-efficiency, medium-assisted continuous laser cleaning of corrosion layers was developed. By comparing the roughness and cleaning depth of rust layers cleaned under conditions of liquid-assisted, solid-assisted, and mixed solid–liquid-assisted laser cleaning, simultaneously establishing a three-dimensional finite element model to study the variations during the cleaning process, and conducting a comparative analysis of the results of both, the cleaning mechanism is elucidated. The experimental results indicate that under conditions of water-assisted cleaning, the depth of rust layer increases initially and then decreases with varying water layer heights. The maximum cleaning depth is achieved at a water layer height of 0.1 mm, while the optimal surface roughness occurs at a water layer height of 0.2 mm, indicating a change in cleaning mechanism. The cleaning pattern with SiO2 activator assistance follows a similar trend to a water medium, reaching maximum cleaning depth at 0.1 mm height, with a slight improvement in surface roughness compared to water-assisted cleaning. Finally, solid–liquid mixing can achieve cleaning completion and improve surface roughness under conditions where water-assisted cleaning alone fails to reach a clean state. Therefore, the active agent can be used for laser cleaning to promote the cleaning process, and solid–liquid mixing to assist the laser cleaning can be a theoretical guide for the field of laser cleaning.

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“…S. vander Linden et al [11] found that in picosecond-pulsed underwater laser ablation of silicon, the volume of material removed per pulse was better than that in the air environment. Yu et al [12] found that liquid-phase laser ablation of silicon nitride can effectively inhibit oxidation, but it will reduce the rate of material removal, and with the increase of scanning speed, the surface roughness increases, and the depth of laser ablation decreases. Zhou et al [13] utilized water-assisted laser ablation in the different water layers and found that the liquid-phase ablation environment can get clearer micrographs and smaller heataffected zones, the liquid-phase environment makes the inner wall of the grooves clean and smooth, and the depth of the grooves decreases with the increase of the liquid-phase flow rate.…”

Section: Introductionmentioning

confidence: 99%

An Analysis of the Morphology Evolution of YG8 Cemented Carbide by Laser Ablation in the Liquid Phase

Fan,

Zhao,

Hao

et al. 2023

Coatings

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To explore the influence of the number of laser ablations on the shape, geometry, and taper of the pitting structure by laser ablation in the liquid phase, three-dimensional confocal microscopy was used to quantitatively characterize the shape of the surface dotting texture of YG8 cemented carbide and analyze the evolution of the morphology based on the liquid-assisted laser ablation test. The results show that the surface pitting structure of YG8 cemented carbide evolves from a micro-convexity to a crater with the increase in the number of laser ablations, and the bottom of the crater produces a convexity after 7 ablations, the shape of the crater evolves to a trapezoidal shape after 13 ablations, and the shape is stable. The size of the dot texture increases with the number of laser ablations and reaches a maximum value of 396 μm in diameter and 149 μm in depth at the 10th and 12th ablations, respectively. The taper of the dot texture showed a trend of decreasing, increasing, and then decreasing with the increase in the number of laser ablations, and the taper was stable with more than seven ablations. This study lays a theoretical foundation for the control of the dot texture morphology on the surface of YG8 cemented carbide by laser ablation in a liquid-phase environment.

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Investigation of mechanism and surface morphology on the femtosecond laser ablation of silicon nitride under different auxiliary processing environments

Cited by 9 publications

References 36 publications

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

The Study of Patterns and Mechanisms of Continuous Laser Ablation of Carbon Steel Rust Layers in Multi-Medium Environments

An Analysis of the Morphology Evolution of YG8 Cemented Carbide by Laser Ablation in the Liquid Phase

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