2001
DOI: 10.1016/s0040-6090(00)01926-x
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Evidence of a high density of fixed negative charges in an insulation layer compound on silicon

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Cited by 16 publications
(9 citation statements)
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“…In this paper, we show the best experimental results of aluminium oxynitride (AlON) films than our previous oxidized AlN films [14] and other group results such as AlF films [10] of an MIS structure with a high density of fixed negative interface charges.…”
Section: Introductionmentioning
confidence: 49%
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“…In this paper, we show the best experimental results of aluminium oxynitride (AlON) films than our previous oxidized AlN films [14] and other group results such as AlF films [10] of an MIS structure with a high density of fixed negative interface charges.…”
Section: Introductionmentioning
confidence: 49%
“…There is a current trend of using metal-insulator (IS) and metalinsulator-semiconductor (MIS) structures in electronic devices [8][9][10]. On the other hand, until now only a few works have reported negatively charged MIS structure [10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%
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“…The I − S structure [3] can be used for I. passivating solar cell surfaces where electron injecting electrodes contact a p-type conduction layer (field induced by I − S structure or by doping) [4].…”
Section: Applicationsmentioning
confidence: 99%
“…The negatively charged IS structure (I − S structure) already described in [2,4] As the most recent results are subject to this publication we refer to [2,4,6] for further information.…”
Section: Introductionmentioning
confidence: 99%