Enhancement of diamond nucleation on silicon substrates in pulsed laser assisted hot filament CVD

Wang, Q.; Schliesing, R.; Zacharias, H.; Buck, V.

doi:10.1016/s0169-4332(98)00436-x

Cited by 7 publications

(2 citation statements)

References 14 publications

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“…These temperature increases were calculated by the heat conduction equation. 13 The three different laser powers corresponding to the three different input currents, 6, 7, and 8 mA, were called low-, medium-and highpower heating conditions, respectively. The deposition conditions were 5 h and 21-25 mbar in pressure.…”

Section: Methodsmentioning

confidence: 99%

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO₂ LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

Amornkitbamrung

Topon

2008

Surf. Rev. Lett.

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An infrared CO 2 laser was used for regional heating to study the heating effect on hot filament chemical vapor deposition of diamond-like carbon formation on Si(100) face substrates. The substrate surface temperature was about 450-500 • C. The power of the laser called low, medium, and high raised the temperature of the substrate locally by 25, 45, and 55 • C, respectively. At medium laser power, at the central laser beam region, a narrow Raman peak centered at 1438 cm −1 was detected. It can be concluded that this region has good-quality DLC. This moderate high-frequency peak corresponds to a fourfold-rotation-symmetry atom in an amorphous carbon network from the tight-binding molecular dynamics simulation of Wang and Ho.

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Section: Methodsmentioning

confidence: 99%

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO₂ LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

Amornkitbamrung

Topon

2008

Surf. Rev. Lett.

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“…high thermal conductivity, high strength, and lowest compressibility) of diamond make it an ideal material for many applications, such as in cutting tools, coatings for magnetic disks, optical switches [1], electronic devices [2], spintronics devices, and quantum computational components [3] and more. Various surface pre-treatment methods have been used to enhance the nucleation density of diamond [4][5][6][7][8]. All these reported methods lead to surface alteration or damage (usually by the formation of nano-scale pits, scratches and defects concentration) and even contaminate the substrate.…”

Section: Introductionmentioning

confidence: 99%

Electron Emission of Graphene-Diamond Hybrid Films Using Paraffin Wax as Diamond Seeding Source

Varshney¹,

Rao²,

Mendoza³

et al. 2012

WJNSE

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We present a scalable, reproducible and economic process for the fabrication of diamond and diamond-graphene hybrid films using paraffin wax as a seeding source for diamond. The films were characterized using Raman spectroscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM), and electron energy loss spectroscopy (EELS). Raman spectra show the characteristic band of diamond at 1332 cm<sup>-1</sup> and the D, G, and 2D bands of graphene at 1360, 1582 and 2709 cm<sup>-1</sup>, respectively. Electron microscopy confirms the microcrystalline nature of the diamond films with crystal size in the range of 0.5 μm to 1.0 μm, and the hybrid film consists of microcrystalline diamond attached to thin, semi-transparent graphene flakes. The graphene-diamond hybrid films exhibit a turn-on field of about 3.6 V/μm with a prolonged current stability of at least 135 h

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Diamond coating deposition by synergy of thermal and laser methods—A problem revisited

Ristić

Trtica

Bogdanov

et al. 2007

Applied Surface Science

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Enhancement of diamond nucleation on silicon substrates in pulsed laser assisted hot filament CVD

Cited by 7 publications

References 14 publications

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO₂ LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO₂ LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

Electron Emission of Graphene-Diamond Hybrid Films Using Paraffin Wax as Diamond Seeding Source

Diamond coating deposition by synergy of thermal and laser methods—A problem revisited

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Enhancement of diamond nucleation on silicon substrates in pulsed laser assisted hot filament CVD

Cited by 7 publications

References 14 publications

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO2 LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO2 LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

Electron Emission of Graphene-Diamond Hybrid Films Using Paraffin Wax as Diamond Seeding Source

Diamond coating deposition by synergy of thermal and laser methods—A problem revisited

Contact Info

Product

Resources

About

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO₂ LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION

SURFACE AND QUALITY MODIFICATION OF DIAMOND-LIKE CARBON FILMS BY CO₂ LASER HEATING ASSISTED HOT FILAMENT CHEMICAL VAPOR DEPOSITION