Enhanced sensitivity of mass detection using the first torsional mode of microcantilevers

Xie, Hui; Vitard, Julien; Haliyo, Sinan; Régnier, Stéphane

doi:10.1088/0957-0233/19/5/055207

Cited by 29 publications

(17 citation statements)

References 35 publications

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“…They used the modal analysis method to solve the differential equation of motion of a piezoelectric microbeam with an added mass at one of its ends. Xie et al [14] proposed a dynamic method for the application of rectangular microbeams as mass sensors using the Rayleigh-Ritz method. Faegh et al [15,16] proposed a self-measuring biosensor using a self-measuring electrical circuit for operation in a fluid environment.…”

Section: Introductionmentioning

confidence: 99%

Effect of microbeam geometry on the nano-mass sensor performance

Ardali

Ghaderi

Raeiszadeh

2019

Mechanics & Industry

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Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.

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Section: Introductionmentioning

confidence: 99%

Effect of microbeam geometry on the nano-mass sensor performance

Ardali

Ghaderi

Raeiszadeh

2019

Mechanics & Industry

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“…be replaced in Eq. (22). Multiplying this equation by φ i (x), integrating from x = 0 to x = 1, and using the normalization condition:…”

Section: Appendixmentioning

confidence: 99%

“…However, exciting higher modes requires much more energy than for the fundamental mode to obtain the same output signal amplitude. Using the first torsional mode of microcantilevers rather than the first bending mode can also improve the resolution by one order [22] [23]. Parametrically excited mechanical systems have also attracted attention [24].…”

Section: Introductionmentioning

confidence: 99%

Bifurcation-based micro-/nanoelectromechanical mass detection

et al. 2014

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This paper investigates an alternative mass sensing technique based on nonlinear micro/nanoelectromechanical resonant sensors. The proposed approach takes advantage of multi-stability and bifurcations of the hysteretic frequency responses of the electrostatically-actuated resonator. For this purpose, a reduced-order model is considered. Numerical results show that sudden jumps in amplitude make the detection of a very small mass possible. Moreover, the limit of detection can be set with the value of the operating frequency. However, when operating at fixed frequency, the study of basins of attraction indicates that this bifurcationbased mass detection does not exhibit the expected robustness. A possible improvement is proposed, based on the reinitialization of the system by a forced jump-down on the hysteretic response curve. Using a frequency sweep which varies slowly in sinusoidal form solves the reinitialization problem and enables automatic real-time detection. Finally the added mass is located on the beam by using the resonance at the first two natural frequencies. Keywords N/MEMS • mass sensing • nonlinear dynamics • basin of attraction • bifurcation • detection • quantification • localization

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“…In measurement of atmospheric or compressible fluid, as the mode number of MCL increases and passes a "coincidence point", the Q factor will finally start to decrease [27,28]. However, the result is different in the incompressible fluid [29][30][31][32]. Since the compression of the gas leads to additional acoustic damping, it was previously assumed to be negligible in the incompressible fluid [33].…”

Section: Introductionmentioning

confidence: 99%

Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor

Wei

Bian

et al. 2020

Sensors

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Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based aerosol mass sensors and reduce gas damping. A finite element fluid-structure interaction model was used to investigate the performance of MCL. It is found that (I) the mass sensitivity and quality factor decline with the increasing of length-to-width ratio which alters the resonant frequency of the MCL. The optimum conditions, including the length-to-width ratio (σlw = 5) and resonant frequency (f0 = 540.7 kHz) of the MCL, are obtained with the constant surface area (S = 45,000 μm2) in the frequency domain ranging from 0 to 600 kHz. (II) The slots can enhance the read-out signal and bring a small Q factor drop. (III) The edge serrations on MCL significantly reduce the gas damping. The results provide a reference for the design of aerosol mass sensor, which makes it possible to develop aerosol mass sensor with high frequency, sensitivity, and quality.

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Enhanced sensitivity of mass detection using the first torsional mode of microcantilevers

Cited by 29 publications

References 35 publications

Effect of microbeam geometry on the nano-mass sensor performance

Effect of microbeam geometry on the nano-mass sensor performance

Bifurcation-based micro-/nanoelectromechanical mass detection

Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor

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