The authors report the study of polarization fatigue in Pb͑Zr, Ti͒O 3 ͑PZT͒ ferroelectric thin films using in situ high-resolution grazing incidence x-ray specular reflectivity of synchrotron radiation. The results demonstrate that there is no formation of a region of different electron densities in the film growth direction with subnanometer depth resolution during fatigue. The upper bounds on the theoretically predicted interfacial accumulation of oxygen vacancies at the interfaces between PZT and Pt electrodes are determined by the comparison of experimental results and theoretical simulations. © 2007 American Institute of Physics. ͓DOI: 10.1063/1.2771534͔Perovskite ͑ABO 3 ͒ ferroelectric oxides have triggered much attention due to their broad potential applications in the next generation of information technology electronics, such as ferroelectric memories and logic devices, owing to their two nonvolatile polarization states. [1][2][3] The nonvolatility of polarization in ferroelectric materials is termed due to the two stable polarization states, which is derived from the switching of the spontaneous polarization under external electric field and being frozen even after the interruption of the electric field. The two ferroelectric polarization states constitute the basic "0" and "1" of logic units. The development of practical ferroelectric devices is absolutely dependent on a robust nonvolatility.However, polarization fatigue can lead to significant deterioration of the nonvolatility, resulting in the failure of the devices. Polarization fatigue represents the decrease of switchable polarization after repeated switching under an external alternating-current ͑ac͒ electric field. [1][2][3][4][5][6][7][8][9][10] It is the most challenging reliability issue for these ferroelectric components. Currently, the increasing accumulation of positively charged oxygen vacancies to the ferroelectric/electrode interfaces is theoretically assumed to be responsible for polarization fatigue. However, so far the microscopic structural aspects of the interfacial oxygen vacancy accumulation have not been fully understood. A vast amount of work has been carried out based on this theoretical understanding to develop fatigue models, e.g., the structural lattice distortion and domain wall pinning. Nevertheless, the improvement for controlling fatigue in Pb͑Zr, Ti͒O 3 ͑PZT͒ thin films with metal electrodes is limited.In the present study, in situ high-resolution grazing incidence x-ray specular reflectivity ͑XRSR͒ of synchrotron radiation was adopted to investigate the structural evolution in ferroelectric thin film capacitors during fatigue. XRSR is a Fourier transform of the spatial distribution of the electron density profile perpendicular to the sample surface. 11 It has a depth resolution of subnanometer, while the inspected sample area is on a macroscopic scale, which makes it ideally suitable for structural observation of two-dimensional nanofilms. The highly parallel and brilliant x rays of synchrotron radiation enable the ...