The local structure around the Mn atoms in MOCVD-grown AlN:Mn films which show Mn-related redorange photoluminescence with a 600nm-peak at room temperature was investigated using the X-ray absorption fine structure (XAFS) measurements. We found that Mn atoms occupy Al lattice sites in the AlN film and that the Mn ions have a charge between +2 and +3. From these results, we think that the redorange luminescence is caused by the transition of d-electrons in the Mn ions.1 Introduction Rare-earth doped AlN is a promising category of material for electroluminescent devices in visible wavelength region and spintronic devices with a high Curie temperature because of its wide bandgap, high melting point, and high luminescence efficiency. Among AlN materials, AlN:Mn shows red-orange photoluminescence (PL) and cathodoluminescence (CL) with a 600 nm-peak [1-3]. The possibility of constructing an electroluminescence (EL) device using this material has been suggested by the preliminary results on the EL operation of powder AlN:Mn [4,5]. Moreover, the redorange PL and EL from AlN:Mn films grown on a glass by MOCVD at the substrate temperature lower than the glass softening point of 600 ºC have been observed [6,7]. This means that it is possible to fabricate the large-area EL devices using AlN:Mn on glass.Although the technique of growing AlN:Mn has been developed over several years, the local atomic structure around Mn atoms in the films was not clearly determined. Because the structure strongly affects the Mn-related luminescence mechanism, determining the structure is very important for raising the quantum efficiency of AlN:Mn. Until now, it was thought from a theoretical analysis of the spectroscopic results [2] that Mn 4+ ions are the origin of red-orange PL, CL, and EL in AlN:Mn. To our knowledge, there is no other report on the charge of Mn and the local structure.