2008
DOI: 10.1016/j.tsf.2007.12.071
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Efficient solar cells based on fine-grained polysilicon

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Cited by 13 publications
(6 citation statements)
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“…Therefore, in the past a lot of technologies were developed to fabricate high-quality c-Si thin films [3], such as solid phase crystallization (SPC) [4], seed layer approach (i.e. metal induced crystallization (ALILE) [5]) or direct crystalline epitaxial growth [6]. However, these technologies suffered from a high defect density in the bulk, limiting the achievable open circuit voltage (Voc) to 560 mV [7].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, in the past a lot of technologies were developed to fabricate high-quality c-Si thin films [3], such as solid phase crystallization (SPC) [4], seed layer approach (i.e. metal induced crystallization (ALILE) [5]) or direct crystalline epitaxial growth [6]. However, these technologies suffered from a high defect density in the bulk, limiting the achievable open circuit voltage (Voc) to 560 mV [7].…”
Section: Introductionmentioning
confidence: 99%
“…Depending by the technology, there is some minimum required thickness for the device in order to guarantee complete absorption of the incoming light, but usually that thickness is of the order of several microns. These technologies were proposed, for example, by IMEC , Fraunhofer‐ ISE , and Solexel .…”
Section: Introductionmentioning
confidence: 99%
“…Polycrystalline Si, or poly-Si, has many applications in the field of microelectronic devices, from conventional fieldeffect transistors, 1 to heterojunction bipolar transistors, 2 and photovoltaics. 3 Due to the ever-shrinking feature sizes in transistors, innovations in annealing beyond conventional rapid thermal processing are necessary to limit diffusion and increase activation of dopants. 4 In particular, flash annealing allows low thermal budgets with high temperatures and very short time scales on the order of 1 ms. 5 The combination of high B concentration with low thermal budgets presents an ideal environment for investigating B segregation to the grain boundaries in poly-Si.…”
Section: Introductionmentioning
confidence: 99%