Efficient prediction of the quality factors of micromechanical resonators

Choi, Jinbok; Cho, Maenghyo; Rhim, Jaewook

doi:10.1016/j.jsv.2009.09.013

Cited by 32 publications

(9 citation statements)

References 21 publications

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“…Their results were upon frequency shift ratio and they did not discuss about the TED ratio sufficiently. Choi et al [13] presented a finite element formulation based on the weak form of fully coupled thermoelastic problems. They applied the model order reduction scheme in order to achieve computational efficiency.…”

Section: Introductionmentioning

confidence: 99%

Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

Vahdat

Rezazadeh

2011

Journal of the Franklin Institute

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Section: Introductionmentioning

confidence: 99%

Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

Vahdat

Rezazadeh

2011

Journal of the Franklin Institute

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“…This internal temperature conduction leads to thermoelastic dissipation and it can be calculated as [13] …”

Section: Thermoelastic Dissipationmentioning

confidence: 99%

Simulations and Experiments Study on the Mechanical Quality Factor of the Cylindrical Shell Fused Silica Resonators

Peng¹,

Pan²,

Qu³

et al. 2016

Proceedings of the 2016 Joint International Information Technology, Mechanical and Electronic Engineering

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Abstract. The cylindrical shell fused silica resonator is the critical component of a cylindrical vibratory gyroscope, and the quality factor is a key parameter to evaluate the performance of the cylindrical resonator. This paper focuses on the quality factor of the cylindrical shell fused silica resonator. The influence of air damping, surface defect loss, thermoelastic dissipation and internal friction loss on the quality factor are studied through simulations, which provide a theoretical trend for quality factor experiments. Quality factor is further explored by means of changing different damping loss of the resonator, for example, annealing, chemical polishing or vacuum pumping in experiments and the Q factor of the experimental cylindrical shell fused silica resonator has been optimized comprehensively, about 110 times.

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“…There are two methods for calculating the quality factor of thermoelastic damping: energy method, in which dissipated and maximum stored energy should be calculated (Sudipto et al, 2006;Prabhakar and Vengallatore, 2008;Serra and Bonaldi, 2009;Guo and Rogerson, 2003), and eigenfrequency method, in which real and imaginary parts of the eigenfrequency should be calculated (Sun and Saka, 2009;Nayfeh and Younis, 2004b;Yi and Matin, 2007;Choi et al, 2010). Each method can be done with numerical or analytical procedures or combination of them.…”

Section: Introductionmentioning

confidence: 99%

Effect of High Electrostatic Actuation on Thermoelastic Damping in Thin Rectangular Microplate Resonators

Mohammadi

Ali

2015

jtam

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In this paper, a micro resonator is modeled as a thin rectangular microplate with thermoelastic damping that is actuated electrostatically. Large static deformation due to high polarization voltage is considered, and vibration of microplate occurs around the static deflection. Due to the effect of thermoelastic damping, the frequency of vibration is a complex value that is used to determine the quality factor of thermoelastic damping. Also, the pull-in voltage is considered because nonlinear properties are more appeared when approaching the polarization voltage to the pull-in voltage.

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Efficient prediction of the quality factors of micromechanical resonators

Cited by 32 publications

References 21 publications

Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

Simulations and Experiments Study on the Mechanical Quality Factor of the Cylindrical Shell Fused Silica Resonators

Effect of High Electrostatic Actuation on Thermoelastic Damping in Thin Rectangular Microplate Resonators

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