In this paper, a micro resonator is modeled as a thin rectangular microplate with thermoelastic damping that is actuated electrostatically. Large static deformation due to high polarization voltage is considered, and vibration of microplate occurs around the static deflection. Due to the effect of thermoelastic damping, the frequency of vibration is a complex value that is used to determine the quality factor of thermoelastic damping. Also, the pull-in voltage is considered because nonlinear properties are more appeared when approaching the polarization voltage to the pull-in voltage.
In this paper, a resonator is modeled as a microbeam under the effect of thermoelastic damping and actuated electrically. Two models, small and large deformation models, are represented by considering linear and nonlinear Euler-Bernoulli beam theory. These models are compared against voltage, and the difference between these models is shown and discussed. In the large deformation model, the microbeam deflected due to applied DC voltage, and vibration of microbeam occurs around this static deflection. The vibration equation is linearized around static deflection and by applying harmonic vibration, equation for mode shape and frequency is obtained. The complex frequency is calculated by numerical method and then used for obtaining the Q-factor of thermoelastic damping. The stretching effect and thermoelastic damping is validated with the literature. The result shows that for the high values of voltage, the large deformation model is more accurate. The behavior of thermoelastic damping is also investigated against the geometrical and material properties.
In this paper, a linear model of thermoelastic damping in annular microplate is considered for calculating the quality factor of this damping. In this model clamped boundary condition is applied in inner and outer circular edges. In the results, there are critical radius and thickness which are calculated analytically and in these dimensions, the thermoelastic damping becomes maximal. The critical radius and thickness depend on material properties, vibration modes and frequencies, dimensions of microplate.
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