The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is determined by the Q factor and frequency mismatch of the cylindrical resonator. Enhancing the Q factor is crucial for improving the rate sensitivity and noise performance of the CRG. In this paper, for the first time, a monolithic cylindrical fused silica resonator with a Q factor approaching 8 × 105 (ring-down time over 1 min) is reported. The resonator is made of fused silica with low internal friction and high isotropy, with a diameter of 25 mm and a center frequency of 3974.35 Hz. The structure of the resonator is first briefly introduced, and then the experimental non-contact characterization method is presented. In addition, the post-fabrication experimental procedure of Q factor improvement, including chemical and thermal treatment, is demonstrated. The Q factor improvement by both treatments is compared and the primary loss mechanism is analyzed. To the best of our knowledge, the work presented in this paper represents the highest reported Q factor for a cylindrical resonator. The proposed monolithic cylindrical fused silica resonator may enable high performance inertial sensing with standard manufacturing process and simple post-fabrication treatment.
Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr 0.53 Ti 0.47 )O 3 (PZT) thin film electrodes (thickness ~2 μm ) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q factor) of resonators, which achieved as high as 2.89 million for n = 2 wineglass modes after being coated with PZT thin film electrodes. The n = 2 wineglass modes of the resonators were driven by PZT thin film electrodes in experiment and simulation with fine vibratory shape, which demonstrated the feasibility of the cylindrical fused silica resonator driven by PZT thin film electrodes. The application of PZT thin film electrodes to drive and detect cylindrical shell fused silica resonator can significantly improve Q factor of resonators and improve the sensitivity of Coriolis Vibratory Gyroscope (CVG).
Fused silica cylindrical resonant gyroscope (CRG) is a novel high-precision solid-wave gyroscope, whose performance is primarily determined by the cylindrical resonator’s frequency split and quality factor (Q factor). The laser Doppler vibrometer (LDV) is extensively used to measure the dynamic behavior of fused silica cylindrical resonators. An electrical method was proposed to characterize the dynamic behavior of the cylindrical resonator to enhance the measurement efficiency and decrease the equipment cost. With the data acquisition system and the designed signal analysis program based on LabVIEW software, the dynamic behavior of the fused silica cylindrical resonator can be analyzed automatically and quickly. We compared all the electrical measurement results with the optical detection by LDV, demonstrating that the fast Fourier transform (FFT) result of the resonant frequency measured by the electrical method was 0.12 Hz higher than that with the optical method. Thus, the frequency split measured by the electrical and optical methods was the same in 0.18 Hz, and the measurement of the Q factor was basically the same in 730,000. We conducted all measurements under the same operation condition, and the optical method was used as a reference, demonstrating that the electrical method could characterize the dynamic behavior of the fused silica cylindrical resonator and enhance the measurement efficiency.
The hemispherical resonator gyroscope (HRG) has attracted the interest of the world inertial navigation community because of its exceptional performance, ultra-high reliability and its potential to be miniaturized. These devices achieve their best performance when the differences in the frequencies of the two degenerate working modes are eliminated. Mechanical treatment, laser ablation, ion-beams etching, etc., have all been applied for the frequency tuning of resonators, however, they either require costly equipment and procedures, or alter the quality factors of the resonators significantly. In this paper, we experimentally investigated for the first time the use of a chemical etching procedure to decrease the frequency splits of hemispherical resonators. We provide a theoretical analysis of the chemical etching procedure, as well as the relation between frequency splits and mass errors. Then we demonstrate that the frequency split could be decreased to below 0.05 Hz by the proposed chemical etching procedure. Results also showed that the chemical etching method caused no damage to the quality factors. Compared with other tuning methods, the chemical etching method is convenient to implement, requiring less time and labor input. It can be regarded as an effective trimming method for obtaining medium accuracy hemispherical resonator gyroscopes.
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