Monolithic Cylindrical Fused Silica Resonators with High Q Factors

Pan, Yao; Wang, Dongya; Wang, Yanyan; Liu, Jianping; Wu, Sudong; Qu, Tianliang; Yang, Kun; Luo, Hui

doi:10.3390/s16081185

Cited by 34 publications

(42 citation statements)

References 22 publications

(53 reference statements)

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“…Furthermore, the temperature-frequency characteristics is highly linear, therefore it is possible to utilize one mode as a measure of gyroscope temperature for the compensation of the sensing mode [12]. Our group has designed and fabricated a monolithic fused silica cylindrical resonator that has high quality factor and small frequency mismatch [13], which is expected to be applied to the high precision inertial navigation and platform stabilization systems. In this paper, the Temperature Coefficient of Frequency (TCF) was studied for this resonator.…”

Section: Introductionmentioning

confidence: 99%

The Study on Temperature Characteristics of a Monolithic Fused Silica Cylindrical Resonator

Wu¹,

Pan²,

Wang³

et al. 2016

Proceedings of the 2016 Joint International Information Technology, Mechanical and Electronic Engineering

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Abstract. Although fused silica has better temperature characteristics than most materials, temperature drift is still one of the main error sources of a Cylindrical Vibratory Gyroscope (CVG) with a monolithic fused silica resonator. The change of temperature changes the characteristics of the material, at the same time changes the overall working status of gyroscope. In this paper, the influence of temperature on the vibration characteristics of fused silica cylindrical resonator is theoretically analyzed and experimentally verified. Results show that the vibration frequency is linearly related to temperature, which provides reference for temperature compensation and performance improvement of CVG.

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Section: Introductionmentioning

confidence: 99%

The Study on Temperature Characteristics of a Monolithic Fused Silica Cylindrical Resonator

Wu¹,

Pan²,

Wang³

et al. 2016

Proceedings of the 2016 Joint International Information Technology, Mechanical and Electronic Engineering

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“…Our research group has reported fused silica cylindrical resonators with the Q factor approaching 10 6 in 2016 [44] and 3 × 10 6 in 2019 [45]. In this research, a fused silica cylindrical resonator with a high Q factor was fabricated in the same way.…”

Section: Experiments and Methodsmentioning

confidence: 99%

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Peng

Qiu

Pan

et al. 2020

Sensors

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The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, have a great influence on the performance of CVG. The frequency mismatch and Q factor of the resonator, in particular, directly determine the precision and drift characteristics of the gyroscope. Although the frequency mismatch and Q factor are natural properties of the resonator, they can change with external conditions, such as temperature, pressure, and external forces. In this paper, the influence of electrostatic forces on the vibrational characteristics of the fused silica cylindrical resonator is investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that the resonant frequency, frequency mismatch, and the decay time slightly decreased with electrostatic forces, while the decay time split increased. Lower capacitive gaps and larger applied voltages resulted in lower frequency mismatch and lower decay time. This phenomenon was theoretically analyzed, and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for fused silica cylindrical resonator with electrostatic transduction, the electrostatic influence on the Q factor and frequency, although small, should be considered when designing the capacitive gap and choosing bias voltages.

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“…In this research, a fused silica cylindrical resonator with a high Q factor was fabricated in the same way as stated in [17]. The sectional view of the resonator with electrodes is shown in Figure 1.…”

Section: Experiments and Methodsmentioning

confidence: 99%

“…Therefore, they have broad applications in the tactical-level inertial navigation system [16]. Our research group has reported fused silica cylindrical resonators with the Q factor approaching 10 6 in 2016 [17] and 3 × 10 6 in 2019 [18].…”

Section: Introductionmentioning

confidence: 99%

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Peng¹,

Qiu²,

Luo³

et al. 2020

Sensors

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The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator.

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Monolithic Cylindrical Fused Silica Resonators with High Q Factors

Cited by 34 publications

References 22 publications

The Study on Temperature Characteristics of a Monolithic Fused Silica Cylindrical Resonator

The Study on Temperature Characteristics of a Monolithic Fused Silica Cylindrical Resonator

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

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