Optical and Electrical Method Characterizing the Dynamic Behavior of the Fused Silica Cylindrical Resonator

Qiu, Zhinan; Qu, Tianliang; Pan, Yao; Jia, Yufei; Fan, Zhenfang; Yang, Kun; Yuan, Jie; Luo, Hui

doi:10.3390/s19132928

Cited by 12 publications

(11 citation statements)

References 26 publications

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“…Different detections can be identified from the literature: capacitive detection [4], laser-based Doppler [4] or interferometer [6]- [7]. By capacitive detection, the capacitive variation due to the resonator's vibration is sensed and transformed into voltage variation based on using a specifically designed circuit (Fig.…”

Section: B Detectionmentioning

confidence: 99%

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Review of Resonator’s Q-Factor Measurement With Focus on Design of Analog and Mixed Circuits for In-Situ Measurement

Zhang

Llaser²

2021

IEEE Open J. Circuits Syst.

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A resonator is one of the important components in electronic systems. It is often used in an electronic system to give an accurate time reference. But it can also be used as a highly sensitive physical parameter sensor especially with the rapid development of fabrication technology for Micro Electro Mechanic System (MEMS) sensors. One of the parameters used to describe the performance of a resonator is its quality factor, also called Q-factor for short. Knowing the Q-factor of a resonator can make sure the performance of the system in which the resonator will be used. For applications in which a resonator is used as a sensing device, it is crucial for the Q-factor to be surveyed and measured in real time. In this paper, a review of a resonator's quality factor (Q-factor) measurement is given. Three major approaches can be identified from the literature: frequency domain, time-frequency domain and time domain. Both advantages and limitations of each approach are presented. Based on the published results, a comparison of the three approaches is conducted. As the time-domain measurement is the only way to present the potential for an in-situ Q-factor measurement but it is relatively less exploited compared with others, a special focus on the time-domain measurement is granted with two time-domain circuit designs.

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Section: B Detectionmentioning

confidence: 99%

“…An optical detection can also be used for detection of the vibration of a resonator. The displacement of the resonator is measured by means of frequency change in case of laserbased Doppler [4] or two optical beams' interference to get the image of the mechanical vibration indirectly with the principle diagram shown in Fig. 5.…”

Section: B Detectionmentioning

confidence: 99%

Review of Resonator’s Q-Factor Measurement With Focus on Design of Analog and Mixed Circuits for In-Situ Measurement

Zhang

Llaser²

2021

IEEE Open J. Circuits Syst.

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“…The excitation direction and the low-frequency principal axis had already been aligned in the same orientation before the measurement. The diagram of the experimental setup is shown in Figure 3, and the testing procedure of the VCMs has been described in detail in [16,44,46]. aligned in the same orientation before the measurement.…”

Section: Vibrational Characteristics Without Electrostatic Influencementioning

confidence: 99%

“…Pro Gyro ® series [14] and InnaLabs Inc. GI-CVG series [15]. Wu et al proposed a noncontact measurement system using electromagnetic excitation and microphone detection [16], which is simple as a testing apparatus, but this system can only characterize metal resonators. Due to minimal damping, electrostatic excitation and detection allow high Q factors, as in [10,[17][18][19][20].…”

Section: Introductionmentioning

confidence: 99%

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Peng

Qiu

Pan

et al. 2020

Sensors

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The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, have a great influence on the performance of CVG. The frequency mismatch and Q factor of the resonator, in particular, directly determine the precision and drift characteristics of the gyroscope. Although the frequency mismatch and Q factor are natural properties of the resonator, they can change with external conditions, such as temperature, pressure, and external forces. In this paper, the influence of electrostatic forces on the vibrational characteristics of the fused silica cylindrical resonator is investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that the resonant frequency, frequency mismatch, and the decay time slightly decreased with electrostatic forces, while the decay time split increased. Lower capacitive gaps and larger applied voltages resulted in lower frequency mismatch and lower decay time. This phenomenon was theoretically analyzed, and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for fused silica cylindrical resonator with electrostatic transduction, the electrostatic influence on the Q factor and frequency, although small, should be considered when designing the capacitive gap and choosing bias voltages.

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“…The outside metal film of the resonator and the main electrodes formed parallel plate capacitors used to excite or detect the vibration of the resonator from different directions. The constructions of electrostatic excitation and detection for fused silica resonators have been described in detail in [26,27]. Using a multifunctional I/O device, the actuating capacitors were connected to applied voltage sources.…”

Section: Electrostatic Excitation and Detectionmentioning

confidence: 99%

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Peng¹,

Qiu²,

Luo³

et al. 2020

Sensors

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The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator.

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Optical and Electrical Method Characterizing the Dynamic Behavior of the Fused Silica Cylindrical Resonator

Cited by 12 publications

References 26 publications

Review of Resonator’s Q-Factor Measurement With Focus on Design of Analog and Mixed Circuits for In-Situ Measurement

Review of Resonator’s Q-Factor Measurement With Focus on Design of Analog and Mixed Circuits for In-Situ Measurement

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

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