Differential vibrating accelerometer (DVA) is a resonant-type sensor which detects the change in the resonant frequency in the presence of acceleration input, i.e. inertial loading. However, the resonant frequency of micromachined silicon resonators is sensitive to the temperature change as well as the input acceleration. Therefore, to design a high-precision vibrating accelerometer, the temperature sensitivity of the resonant frequency has to be predicted and compensated accurately. In this study, a temperature compensation method for resonant frequency is proposed which controls the electrostatic stiffness of the dual-ended tuning fork (DETF) using the temperature-dependent dc voltage between the parallel plate electrodes. To do this, the electromechanical model is derived first to predict the change in the electrostatic stiffness and the resonant frequency resulting from the dc voltage between the resonator and the electrodes. Next, the temperature sensitivity of the resonant frequency is modeled, estimated and compared with the measured values. Then it is shown that the resonant frequency of the DETF can be kept constant in the operating temperature range by applying the temperature-dependent driving voltage to the parallel plate electrodes. The proposed method is validated through experiment.
A Hemispherical Resonator Gyro (HRG) is the Coriolis Vibratory Gyro (CVG) that measures rotation angle or angular velocity using Coriolis force acting the vibrating mass. A HRG can be used as a rate gyro or integrating gyro without structural modification by simply changing the control scheme. In this paper, differential control algorithms are designed for a 2-piece HRG. To design a precision controller, the electromechanical modelling and signal processing must be pre-performed accurately. Therefore, the equations of motion for the HRG resonator with switched harmonic excitations are derived with the Duhamel Integral method. Electromechanical modeling of the resonator, electric module and charge amplifier is performed by considering the mode shape of a thin hemispherical shell. Further, signal processing and control algorithms are designed. The multi-flexing scheme of sensing, driving cycles and x, y-axis switching cycles is appropriate for high precision and low maneuverability systems. The differential control scheme is easily capable of rejecting the common mode errors of x, y-axis signals and changing the rate integrating mode on basis of these studies. In the rate gyro mode the controller is composed of Phase-Locked Loop (PLL), amplitude, quadrature and rate control loop. All controllers are designed on basis of a digital PI controller. The signal processing and control algorithms are verified through Matlab/Simulink simulations. Finally, a FPGA and DSP board with these algorithms is verified through experiments.
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