Effect of Structure, Composition, and Micromorphology on the Hydrophobic Property of F‐DLC Film

Abstract

Fluorinated diamond-like carbon (F-DLC) films were prepared by radio frequency plasma-enhanced chemical vapor deposition technique with CF4and CH4as source gases under different deposition conditions. The chemical bonding structure and composition of the films were detected by Raman, Fourier transform infrared absorption spectrometry (FTIR), and X-ray photoelectron spectroscopy (XPS) characterization. The micromorphology and surface roughness of the film were observed and analyzed by atomic force microscopy (AFM). The results indicated that all the prepared films presented a diamond-like carbon structure. The relative content of fluorine in the films increased, containing more CF2groups. The ratio of hybrid structure sp3/sp2decreased. The surface roughness of the films increased when the gas flow ratioR(R = CF4/[CH4 + CF4]) or the deposition power increased. The contact angle of water with the surface of the F-DLC film was measured with a static drop-contact angle/surface tension measuring instrument. The hydrophobic property of the F-DLC films was found to be dependent on the sp2structure, fluorine content, and surface roughness of the films. The contact angle increased when the relative content of fluorine in the films and sp2content increased, whereas the contact angle first increased and then decreased with the surface roughness.

Effect of TiN/C Microstructure Composite Layer on the Adhesion of FDLC Film onto Silicon Substrate

“…Coatings 2018, 8,18 decreased Ti-O bonding in the composite layer, whereas N-O increased bonding and slightly increased the Ti-N content. …”

“…According to the reference [36][37][38][39], peak C1s can be Coatings 2018, 8,18 of the combination of Ti and C in XRD spectrum was found. This finding demonstrated that the major element of the composite film was TiN under the present preparation conditions and parameters.…”

“…Coatings 2018, 8,18 divided into three peaks. The two peak position at about 283.7 and 284.4 eV corresponds to the Csp 2 and Csp 3 hybrid-bonding structures, respectively, which indicate that graphite and diamond phases existed in the composite layer or FDLC film.…”

“…Fluorinated diamond-like carbon (FDLC) film is modified materials that are based on the DLC film. FDLC film possess not only the excellent properties of DLC film but also strong absorption of ultraviolet light, low dielectric constant, small friction coefficient, and biocompatibility [6][7][8][9][10][11]. Accordingly, FDLC film has been a research focus in material science.…”

Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties

“…Most of those limitations can be circumvented by a modification of the DLC film, that is, by the addition of one or more elements to the film [6]. Apart from a few light elements, for example, B [7], N [8], or F [9], mainly transition metals are added for this purpose [6,10].…”