2018
DOI: 10.3390/coatings8010018
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Effect of TiN/C Microstructure Composite Layer on the Adhesion of FDLC Film onto Silicon Substrate

Abstract: Deposition techniques of direct current and radio-frequency magnetron sputtering were used to separately prepare TiN/C microstructural composite layer and fluorinated diamond-like carbon (FDLC) film on monocrystalline silicon. The aim was to investigate the effects of microstructural composite layers on the adhesion property of FDLC film. The results indicated that the TiN/C microstructural composite layer can distinguish from the substrate and the FDLC film. After adding the composite layers, the film-substra… Show more

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Cited by 9 publications
(4 citation statements)
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“…The peak at 401.2 eV belongs to N-O, which is related to the oxygen adsorption on the samples surface. 29 Nitrogen content increases with the increase of nitrogen gas flow, as shown in Fig. 5d.…”
Section: Results and Disscusionmentioning
confidence: 74%
“…The peak at 401.2 eV belongs to N-O, which is related to the oxygen adsorption on the samples surface. 29 Nitrogen content increases with the increase of nitrogen gas flow, as shown in Fig. 5d.…”
Section: Results and Disscusionmentioning
confidence: 74%
“…Useful asymptotics solutions have been derived in Equations (14)- (22) for stiff layers over soft substrates, where α → 1 or E 1 /E 2 → ∞ , e.g., metal coatings on elastomers, and for soft layers over stiff substrates, where α → −1 or E 1 /E 2 → 0 , e.g., polymer coatings over metals; furthermore, intermediate expansions have been derived for near-homogeneous problems.…”
Section: Discussionmentioning
confidence: 99%
“…The relative error is below 1% for E 1 /E 2 ≥ 200 (α ≥ 0.99) in Equation (20), for E 1 /E 2 ≤ 0.6 (α ≤ −0.25) in Equation (21), and for 0.4 ≤ E 1 /E 2 ≤ 2.1 (−0.44 ≤ α ≤ 0.36) in Equation (22). The equations can be used with confidence for all values of α outside the interval 0.36 < α < 0.99 where the exact analytical solutions in Equations (10) and (A2), or the results in Table 5, should be applied.…”
mentioning
confidence: 94%
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