In order to study total dose radiation effects of PbZr x Ti 1−x O 3 (PZT) film made with the pulsed excimer laser deposition (PLD) technique, hysteresis loops and capacitance-voltage (C-V ) curves of PZT film capacitors have been measured before and after γ -ray irradiation. The results show that, in a range of 0-2 × 10 5 Gy (Si), with increasing total dose, the remanent polarization 2P r increased while dielectric constant ε decreased. This can be explained by charges trapped by some defects during irradiation.