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1999
DOI: 10.1088/0268-1242/14/9/315
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Total dose radiation effects of Pt/PZT/Pt ferroelectric capacitors fabricated by PLD method

Abstract: In order to study total dose radiation effects of PbZr x Ti 1−x O 3 (PZT) film made with the pulsed excimer laser deposition (PLD) technique, hysteresis loops and capacitance-voltage (C-V ) curves of PZT film capacitors have been measured before and after γ -ray irradiation. The results show that, in a range of 0-2 × 10 5 Gy (Si), with increasing total dose, the remanent polarization 2P r increased while dielectric constant ε decreased. This can be explained by charges trapped by some defects during irradiatio… Show more

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Cited by 8 publications
(7 citation statements)
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“…At the elevated applied electric field used to measure saturated electromechanical response (250 kV cm −1  DC bias), the drive for domain wall motion exceeds that of the defect, and the degradation of functional response is, at least partially, overcome, even at higher TID levels. Indeed, the values of φ N for d 33 , f , saturation measurements are very similar to those extracted from work by Gao et al ., for measurements of dielectric permittivity of irradiated PZT thin films with an applied 133 kV cm −1 DC bias 54 . The implication that applied electric field potentially negates the deleterious effects of defects created by gamma irradiation is not new.…”
Section: Effect Of Microstructure On Defect Interactions In Ferroelecmentioning
confidence: 99%
“…At the elevated applied electric field used to measure saturated electromechanical response (250 kV cm −1  DC bias), the drive for domain wall motion exceeds that of the defect, and the degradation of functional response is, at least partially, overcome, even at higher TID levels. Indeed, the values of φ N for d 33 , f , saturation measurements are very similar to those extracted from work by Gao et al ., for measurements of dielectric permittivity of irradiated PZT thin films with an applied 133 kV cm −1 DC bias 54 . The implication that applied electric field potentially negates the deleterious effects of defects created by gamma irradiation is not new.…”
Section: Effect Of Microstructure On Defect Interactions In Ferroelecmentioning
confidence: 99%
“…[49][50][51][52] There is potential for MEMS or NEMS (NanoElectroMechanical Systems) switches to replace semiconductor devices for radiation hard logic and memory devices, again for space and nuclear electronic applications. [49][50][51][52] There is potential for MEMS or NEMS (NanoElectroMechanical Systems) switches to replace semiconductor devices for radiation hard logic and memory devices, again for space and nuclear electronic applications.…”
Section: Irradiation Of Ferroelectric Materialsmentioning
confidence: 99%
“…Radiation-induced charge trapping within the gate dielectric of silicon devices can cause failure or loss of data. 49 The sensitivity of PZT to gamma radiation effects appears to be strongly dependent on the fabrication method and quality, 49,52 with the effect of the radiation depending on the initial domain pattern 50 and pre-existing defect structures. MEMS switches, however, use a metal to metal contact which is inherently radiation hard and is mechanically decoupled from the "gate" circuit.…”
Section: Irradiation Of Ferroelectric Materialsmentioning
confidence: 99%
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“…See [7,8] for example. The effects of γ-ray total dose radiation on such ferroelectric capacitors have been investigated to evaluate vulnerability or radiation hardness.…”
Section: Effect Of Mild Radiation Dose On Phase Shifter Performancementioning
confidence: 99%