Effect of annealing in oxygen atmosphere on structure and microwave properties of multilayered tunable (Ba,Sr)TiO3 capacitors

Tumarkin, A. V.; Gagarin, A. G.; Altynnikov, A. G.; Gaǐdukov, M. M.; Odinets, A. A.; Razumov, S. V.; Kozyrev, A. B.

doi:10.1016/j.tsf.2015.09.057

Cited by 13 publications

(5 citation statements)

References 33 publications

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“…Furthermore, Tumarkin et al . 14 have studied the influence of annealing temperature T an on the chemical and crystalline phase composition on RF magnetron BSTO grown films. By measuring the XRD pattern, they found out that the annealing of BSTO film at T an = 750 °C at a temperature higher than that of the substrate ( T s = 700 °C) may introduce changes in the chemical and phase composition.…”

Section: Introductionmentioning

confidence: 99%

“…In this context, X-ray diffraction was employed to measure the in-plane and the out-of-plane lattice parameters of Ba x Sr 1−x TiO 3 determined from the diffraction peaks of the rocking curve with the only goal to determine the mean residual strain in the BSTO grown film 1,5,9,13,14 . Moreover, only a little attention was devoted to the changes in the shape of diffraction profiles and to the analysis of the crystalline structure in terms of crystal quality, size and defects.…”

Section: Introductionmentioning

confidence: 99%

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Real time in situ x-ray diffraction study of the crystalline structure modification of Ba0.5Sr0.5TiO3 during the post-annealing

Bauer

Rodrigues

Baumbach

2018

Sci Rep

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We report about an in situ study of crystalline structural changes during thermal treatment of a Ba0.5Sr0.5TiO3 (BSTO) film grown on MgO. The study covers the complete cycle of heating, annealing and cooling and reveals simultaneous phenomena of phase transitions and strain evolution, which have been characterized by in situ 2D reciprocal space mapping (2D-RSM) using high-resolution synchrotron x-ray diffraction in coplanar and grazing incidence geometries. In this way, temperature induced phase transformation from the BSTO2 to the BSTO1 phase has been monitored and the appearance of a further crystalline phase was detected. Moreover, for both BSTO phases, transitions between in-plane compressive and tensile states have been determined during thermal treatment. Furthermore, a contraction of the out-of-plane lattice components has been observed during the annealing phase while the in-plane lattice components remain leading to the change of the residual in-plane strain towards tensile state. The in situ 2D-RSM findings provide valuable and versatile insights into strain engineering and structure modification upon thermal treatment.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Real time in situ x-ray diffraction study of the crystalline structure modification of Ba0.5Sr0.5TiO3 during the post-annealing

Bauer

Rodrigues

Baumbach

2018

Sci Rep

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“…The LiFeSi/BST one exhibits a significantly higher permittivity and shows an almost two-fold increase in it as a result of annealing. The increase in the permittivity is obviously related to the improvement in the crystal structure of the barium-strontium titanate as a result of annealing in an oxygen atmosphere [ 28 , 29 ]. The decrease in dielectric permittivity under the applied DC voltage was about 1% under electric field strength of 10 V/cm.…”

Section: Resultsmentioning

confidence: 99%

Barium-Strontium Titanate/Porous Glass Structures for Microwave Applications

Tumarkin

Tyurnina

et al. 2020

Materials

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Based on porous silicate glasses obtained by ion exchange, glass-ceramic materials containing a solid solution of barium-strontium titanate with a dielectric constant of more than 100 at microwaves, were synthesized for the first time. Glass-ceramic structures were studied using X-ray diffraction, secondary electron microscopy, Mössbauer spectroscopy and porometry methods. Electrical characteristics such as permittivity and losses of as-prepared and annealed in oxygen medium samples were also investigated at microwaves. It was shown that the method of obtaining porous glasses, due to ion exchange between KFeSi glass and LiNO3 and NaNO3 melts, allows for controlling a wide range of pore sizes and makes it possible to form glass porous structures with pores of the required size. The efficiency of the process of filling a porous matrix with a ferroelectric filler was investigated and the average depth of its penetration was estimated. It was shown that annealing glass-ceramic structures in an oxygen environment had a positive effect on their structural and electrical characteristics. Glass-ceramic structures demonstrate a significant increase in permittivity and a decrease in losses after high-temperature treatment in oxygen.

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“…Сегодня на базе сегнетоэлектрических (СЭ) тонких пленок реализованы лабораторные макеты управляемых фильтров, конденсаторов с высокой добротностью и фазовращателей для частотного диапазона вплоть до 60 GHz [5][6][7][8]. Наиболее исследованными материалами для СВЧ применений являются твердые растворы титаната бария-стронция Ba x Sr 1−x TiO 3 (BST) [9].…”

Section: Introductionunclassified

Начальные Стадии Роста Пленок Цирконата-Титаната Бария И Станната-Титаната Бария На Монокристаллических Подложках Сапфира И Карбида Кремния

Tumarkin¹,

Злыгостов²,

Серенков³

et al. 2018

Физика Твердого Тела

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Впервые исследованы начальные стадии роста сегнетоэлектрических пленок цирконата-титаната бария и станната-титаната бария на подложках монокристаллического сапфира и карбида кремния. Выбор подложек обусловлен возможностью применения данных структур в сверхвысокочастотных устройствах. Показано, что рост островковых пленок BaZrx Ti 1−x O 3 происходит посредством механизма массопереноса частиц через газовую фазу во всем исследуемом температурном диапазоне. При конденсации BaSnx Ti 1−x O 3 пленок в температурной области ∼ 800 • C происходит смена механизма массопереноса с поверхностной диффузии на диффузию через газовую фазу, кроме того наблюдается существенная разница в компонентном составе пленок на сапфире и карбиде кремния. Отмечено, что при росте оксидных пленок на поверхности подложки карбида кремния образуется промежуточный слой SiO 2 , толщина которого зависит от температуры осаждения. А.В. Тумаркин, М.В. Злыгостов и А.А. Одинец выражают благодарность за финансовую поддержку РФФИ в рамках научных проектов 16-07-00617, 16-29-0514, 18-37-00348 и Минобрнауки России (государственное задание № 3.3990.2017/4.6).

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Effect of annealing in oxygen atmosphere on structure and microwave properties of multilayered tunable (Ba,Sr)TiO3 capacitors

Cited by 13 publications

References 33 publications

Real time in situ x-ray diffraction study of the crystalline structure modification of Ba0.5Sr0.5TiO3 during the post-annealing

Real time in situ x-ray diffraction study of the crystalline structure modification of Ba0.5Sr0.5TiO3 during the post-annealing

Barium-Strontium Titanate/Porous Glass Structures for Microwave Applications

Начальные Стадии Роста Пленок Цирконата-Титаната Бария И Станната-Титаната Бария На Монокристаллических Подложках Сапфира И Карбида Кремния

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