Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in Advanced MEMS Fabrication Platform

Wu, Guoqiang; Han, Biao; Cheam, Daw Don; Wai, Leong Ching; Chang, Peter Hyun Kee; Singh, Navab; Gu, Yuandong

doi:10.1109/tie.2018.2851946

Cited by 19 publications

(5 citation statements)

References 22 publications

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“…Owing to the microvolume, easy integration, and mass production, micro-electro-mechanical system (MEMS) gyroscopes are indispensable angular rate sensors in a myriad of areas including inertial guidance, aerospace, and national defense industry [1][2][3][4][5]. Typically, the accurate detection of angular rates is highly dependent on the high-precision control of drive axis and sense axis.…”

Section: Introductionmentioning

confidence: 99%

Actor Critic Neural Network-Based Adaptive Control for MEMS Gyroscopes Suffering from Multiresource Disturbances

Jing

Qiao

2021

Mathematical Problems in Engineering

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In this paper, an actor critic neural network-based adaptive control scheme for micro-electro-mechanical system (MEMS) gyroscopes suffering from multiresource disturbances is proposed. Faced with multiresource interferences consisting of parametric uncertainties, strong couplings between axes, Coriolis forces, and variable external disturbances, an actor critic neural network is introduced, where the actor neural network is employed to estimate the packaged disturbances and the critic neural network is utilized to supervise the system performance. Hence, strong robustness against uncertainties and better tracking properties can be derived for MEMS gyroscopes. Aiming at handling the nonlinearities inherent in gyroscopes without analytically differentiating the virtual control signals, dynamic surface control (DSC) rather than backstepping control method is employed to divide the 2nd order system into two 1st order systems and design the actual control policy. Moreover, theoretical analyses along with simulation experiments are conducted with a view to validate the effectiveness of the proposed control approach.

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Section: Introductionmentioning

confidence: 99%

Actor Critic Neural Network-Based Adaptive Control for MEMS Gyroscopes Suffering from Multiresource Disturbances

Jing

Qiao

2021

Mathematical Problems in Engineering

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“…On the other hand, it is not suitable for measuring the out-of-plane vibration because the comb electrode does not distinguish positive or negative sensing in the outof-plane direction. Previously, there has been a large number of studies on many triaxial MEMS capacitive gyroscopes composed of independent single axis elements [7][8][9]. In the case of these gyroscopes, x-axis and y-axis sensing elements are generally designed so that out-of-plane Coriolis forces are captured with vertical electrodes, while the z-axis sensing element is designed as an in-plane comb electrode.…”

Section: Introductionmentioning

confidence: 99%

MEMS triaxial gyroscope using surface and sidewall doping piezoresistors

Takahashi

Abe

Takahata

et al. 2020

J. Micromech. Microeng.

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This paper describes a MEMS triaxial gyroscope utilizing three-dimensional piezoresistive elements. MEMS gyroscopes are widely used for robot motion control, drones, mobile phones and so on. Although a piezoresistive sensing element has the potential for high sensitivity to angular velocity via vibrations that occur due to the Coriolis force, a commonly used piezoresistor, which is formed on a device surface, is not suitable to measure in-plane deformations. Thus, it is difficult to realize a sensing element for a triaxial gyroscope with conventional piezoresistors, especially an element for the detection of vertical axis angular velocity. Here, we propose a triaxial gyroscope utilizing surface and sidewall doping piezoresistors as the sensing element. The surface and sidewall doping piezoresistors detect out-of-plane and in-plane vibrations due to the corresponding three-dimensional Coriolis forces, respectively. As a result, the triaxial angular velocity becomes measurable. The experimental results show that the fabricated gyroscope responds to three-dimensional angular velocities with low crosstalk. Therefore, the proposed gyroscope is suitable for practical angular velocity measurement applications.

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“…Special consideration is required to avoid any misalignment in all three axes. To overcome these issues, discrete, three single-axis gyroscopes fabricated on the same die have been proposed [8], eventually reducing the size and fabrication cost. However, the reduction in size is still limited by the design of individual gyroscopes.…”

Section: Introductionmentioning

confidence: 99%

Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

2019

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This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structural thickness of 30 µm and packaged at 100 mtorr using wafer level packaging. The fabricated multi-axis gyroscope has a small footprint of 1426 × 1426 µm2, making it one of the smallest multi-axis gyroscopes. A custom printed circuit board (PCB) was designed for the evaluation of the multi-axis gyroscope. The experimental results demonstrate that the gyroscope has a high sensitivity of 12.56 μ V / dps , 17.13 μ V / dps and 25.79 μ V / dps in the roll (X-sense), pitch (Y-sense) and yaw (Z-sense) modes respectively. The scale-factor non-linearity of the gyroscope is less than 0.2 % for roll and pitch mode and 0.001 % for the yaw mode, in the full-scale range of ± 1500 deg / s . The multi-axis gyroscope demonstrates an angle random walk of 2.79 dps / Hz , 2.14 dps / Hz , and 1.42 dps / Hz , for the roll, pitch and yaw rate with the in-run bias stability 1.62 deg / s , 1.14 deg / s and 0.84 deg / s respectively.

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Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in Advanced MEMS Fabrication Platform

Cited by 19 publications

References 22 publications

Actor Critic Neural Network-Based Adaptive Control for MEMS Gyroscopes Suffering from Multiresource Disturbances

Actor Critic Neural Network-Based Adaptive Control for MEMS Gyroscopes Suffering from Multiresource Disturbances

MEMS triaxial gyroscope using surface and sidewall doping piezoresistors

Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

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