Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range

Abstract

Many application areas such as semiconductor manufacture, precision optics alignment, and microbiological cell manipulation require ultraprecision positioning systems with a high positioning resolution and large motion range. This article describes the development of a compact high precision linear piezoelectric stepping positioner for precision alignment of optical elements. The positioner is designed to have a compact and symmetric structure, high positioning resolution, large motion range, high force density, adequate dynamic range, and power-off hold. The positioner is fabricated according to these specifications and performance evaluation tests are carried out. A resolution of 10 nm, speed of 1 mms, push force of 25 N, and stiffness of 10.4 N/microm are attained while maintaining a compact size of 32x42x60 mm(3). The required power consumption is 52.33 W. The test results confirm that the developed positioner could be successfully applied to the precision alignment of optical elements.

Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacement

“…We adapted the XY piezoelectric stepping positioners, which were developed by the authors due to their high resolution, high stiffness, compact size, high-force density, and power-off characteristics. 18,19 As shown in the authors' previous work, this actuation system can provide the high precision motion, even though there are sliding frictions in the linear guide, because it uses the direct drive and direct measure on its final moving part. However, for the revolute joints in this mechanism, the conditions are different as there is neither the measure nor the correction on the joints to address the problem of the joints causing imprecise motion due to clearance and backlash.…”

Improving the accuracy of walking piezo motors

“…Other interesting new designs of linear motors with improved performance can be found in Refs. [41][42][43][44]. However, all of these motors have disadvantages in comparison to the motor described in this paper: either the pushing force is significantly smaller and the rigidity therefore less, or the motor shows large jumps in the displacement, or the motor is not designed for operation in UHV.…”

Design and experiment performances of an inchworm type rotary actuator

“…According to their working principles, piezodriven actuators can be mainly classified into direct driving actuators [1][2][3][4][5][6] and stepping driving actuators. [7][8][9][10][11][12][13][14][15][16] Direct driving actuators usually have a quick response and a large output force, but the working range is always limited within several tens of micrometers which is a big drawback of it. Stepping driving actuators are some actuators that can move step by step, large range motion can be realized easily and the size can be compacted in this way.…”

“…The inchworm actuator 8,9,11,14,15 is one kind of biomimetic stepping driving actuators developed recent years by researchers who are inspired by the motion of nature inchworm. Inchworm actuators usually have three major components: two clamping units and one driving unit.…”