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A piezoelectric-driven actuator based on the lateral motion principle is proposed in this paper, it can achieve large-stroke linear motion with high resolution. One parallelogram-type flexure hinge mechanism and one piezoelectric stack are used to generate the lateral motion. The mechanical structure and working principle are discussed. A prototype was fabricated and a series of experiments were carried out to investigate its working performance. The results indicate that the maximum moving speed is about 14.25 mm s −1 , and the maximum output force is 3.43 N, the minimum stepping displacement is about 0.04 μm. The experiments confirm that the lateral motion can be used to design piezoelectric actuators with a large moving stroke and high accuracy with a compact size. This actuator can be used in fast tool servo systems for ultraprecision machining, precision motors for aerospace, focusing systems for optics, and so on.

A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32,000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.

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A piezo-driven linear actuator based on the improved stick-slip principle is developed in this article. With the help of two piezo-stacks and flexure hinges, the preload force can be changed, so the designed actuator can realize relatively large linear ranges and large output force. The designed actuator mainly consists of the mover, the stator, two piezostacks, an adjusting stage and the base. The working principle and theoretical analysis are described. A prototype actuator was fabricated and a series of experiments were carried out to investigate the work characteristics of it. Experimental results indicate that the maximum speed is about 3.086 mm/s and the maximum output force is 0.98 N. They are both improved compared with the traditional stick-slip motion. Experimental results confirm that the proposed actuator can realize large output force relatively and different motion speeds with high accuracy under different driving voltages and frequencies.