Design and experiment performances of an inchworm type rotary actuator

Li, Jianping; Zhao, Hongwei; Shao, Mingkun; Zhou, Xiaoqin; Huang, Hu; Fan, Zunqiang

doi:10.1063/1.4892998

Cited by 28 publications

(18 citation statements)

References 22 publications

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“…A piezoelectric motor has the advantages of a simple structure, convenient control, easy miniaturization, a high displacement resolution, a fast response speed, and miniature precision actuation, which has been widely studied by many researchers [ 1 , 2 ]. According to the working principle, piezoelectric motors can be roughly divided into four types [ 3 , 4 , 5 , 6 , 7 , 8 ], including standing wave, travelling wave, inchworm, and impact motors. The standing wave and travelling wave motors are collectively called an ultrasonic motor.…”

Section: Introductionmentioning

confidence: 99%

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

Han

Xia

et al. 2018

Sensors

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This paper presents a novel impact rotary motor based on a piezoelectric tube actuator with helical interdigitated electrodes which has a compact structure and high resolution. The assembled prototype motor has a maximum diameter of 15 mm and a length of 65 mm and works under a saw-shaped driving voltage. The LuGre friction model is adopted to analyze the rotary motion process of the motor in the dynamic simulations. From the experimental tests, the first torsional resonant frequency of the piezoelectric tube is 59.289 kHz with a free boundary condition. A series of experiments about the stepping characteristics of different driving voltages, duty cycles, and working frequencies are carried out by a laser Doppler vibrometer based on a fabricated prototype motor. The experimental results show that the prototype rotary motor can produce a maximum torsional angle of about 0.03° using a driving voltage of 480 Vp-p (peak-to-peak driving voltage) with a duty ratio of 0% under a small friction force of about 0.1 N. The motor can produce a maximum average angle of about 2.55 rad/s and a stall torque of 0.4 mN∙m at 8 kHz using a driving voltage of 640 Vp-p with a duty ratio of 0% under a large friction force of about 3.6 N. The prototype can be driven in forward and backward motion and is working in stick-slip mode at low frequencies and slip-slip mode at high frequencies.

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Section: Introductionmentioning

confidence: 99%

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

Han

Xia

et al. 2018

Sensors

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“…The force F L3,D ¼ ½0, 0, 2 M dz À RF dy À Á T denotes the reaction condition of point D with respect to link 3. In view of the force-deflection relationships at the point D, the following equations can be expressed as Then, the unknown forces F dx , F dy , and M dz can be derived in terms of F in by equations (18) and (19). Accordingly, substituting equation (14) into equation (19) results in the displacement of point D along the y-axis: the displacement u dy of point D along the y-axis…”

Section: Output Compliancementioning

confidence: 99%

“…Lee et al 12 proposed a pure nano-rotation scanner, where two PZT actuators were employed to supply opposing forces for a rotational angle of 497.2 mrad. Li et al 19 designed a rotary driving stepper for inchworm actuator, which utilizes four PZTs to realize the largest step angle of 1360 mrad. While these rotary stages with rotational symmetric structure have an issue of actuation redundancy, 20 which employ two or more actuators for generating the rotary motion, resulting in complex controller, parasitic motion, and manufacturing cost.…”

Section: Introductionmentioning

confidence: 99%

A decoupled flexure-based rotary micropositioning stage with compact size

Zhu

Wen

Chen

et al. 2017

Proceedings of the Institution of Mechanical Engineers, Part C:

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This paper presents the design and analysis of a novel compact flexure-based rotary micropositioning stage driven by piezoelectric actuator. The developed stage possesses a double four-bar rotary mechanism with rotational symmetric configuration and totally kinematic decoupling, which can convert the linear motion of the piezoelectric actuator into the pure rotational motion, significantly minimizing the parasitic error at the rotation center. Based on the configuration, a single piezoelectric actuator is employed to drive the stage, avoiding actuator redundancy and large configuration size. Meanwhile, we introduce a compliant rotational guiding mechanism to enhance the rotational stiffness and dynamics of the stage. Analytical modeling and finite element analysis are adopted to facilitate the design of dimension. Finally, a prototype of the stage is manufactured and tested, which is capable of a rotational angle of [Formula: see text] with the first natural frequency of 430 Hz, whilst the well-constrained maximum center shift along the X- and Y-axis are 0.29 µm and 0.12 µm, respectively, indicating good decoupling capability. Furthermore, the compact size of [Formula: see text] is beneficial for limited working space.

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“…Although many researchers and institutions are actively developing inchworm technology [11][12][13][14][15] most publications describe the design and performance characterization of the actuator. They are mainly concerned with metrics such as slew rate, holding force or torque, and resolution of the device.…”

Section: Introductionmentioning

confidence: 99%

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Shields

2019

Actuators

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Inchworm actuators are innovative mechanisms that offer nanometer-level positioning coupled with extreme dynamic range. Because of this, they have found applications in optical instruments of various types including interferometers, segmented reflectors, and coronagraphs. In this paper, we present two prototypes of flight-qualifiable inchworm actuators developed at the Jet Propulsion Laboratory. These actuators have two sets of brake piezoceramic (PZT) stacks and an extension PZT stack used for mobility. By proper phasing of the signals to these PZTs, a walking gait can be achieved that moves a runner attached via a flexure to the optic to be moved. A model of these devices, based on first principles, is developed as well as an estimation and control scheme for precise positioning. The estimator estimates physical parameters of the device as well as a self-induced motion disturbance caused by the brakes. Simulations and test data are presented that demonstrate nanometer-level positioning precision as well as the cause of variations in the brake-induced disturbance.

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Design and experiment performances of an inchworm type rotary actuator

Cited by 28 publications

References 22 publications

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

A decoupled flexure-based rotary micropositioning stage with compact size

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

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