Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacement

Abstract

This paper details the development of a novel flexure jointed precision parallel nano-positioning system in combination with piezo-electric stepping motor for the application of precise optics alignment. The characteristics of the developed system are evaluated in this paper by the simulation and experiments. Based on the precision piezo-electric stepping motor and flexure joints, a high precision motion is obtained. Results of this paper include that of a translation resolution of 15 nm and a rotational resolution of 0.14 arc sec being achieved. In addition, the piezo-electric stepping motors provide a power-off hold characteristic to the system. Meanwhile, the parallel structure provides the high dynamic bandwidth of the lowest resonant frequency of 396.1 Hz. The symmetric structure is advantageous for thermal variation. To increase the motion range of the system, all of flexure joints are designed specially and the coupled workspace of ±2 mm × ±2 mm × ±2 mm × ±2° × ±2° × ±2° is achieved. The overall size of the designed system is Φ350 mm × 120 mm.

Compliant joints for the improvement of the dynamic behaviour of a gantry stage with direct drives

“…There are examples with one and two degrees of freedom (DoF) (see e.g. [4], [5]) or even six DoF movability [6]. Mechanisms with three DoF for planar movement (XYθ, see e.g.…”

“…[7]) and three translational DoF (XYZ) are investigated in [8] or [9]. In these studies, both serial [4], [8] and parallel [5][6][7], [9] mechanism structures are designed and piezoelectric actuators are often used. Other applications are for example clamping mechanisms for tool holders [10] or part assembling and insertion units [11].…”

Visual Servo Control System of a Piezoelectric2-Degree-of-Freedom Nano-Stepping Motor

“…Its stepping resolution of translation and rotation are 100 nm and 0.04 • , respectively. As it is well-known, piezoelectric elements have inherent nanometer resolution if they work in scanning mode [2][3][4], i.e., driven by smoothly adjusting its voltage. Adding amplifying mechanisms [5][6][7] for piezoelectric elements extends the stroke.…”

A novel flexure-based microgripper with double amplification mechanisms for micro/nano manipulation

“…Micro/nano manipulation mainly refers to manipulating micro-objects for different assembly and fabrication tasks. [1][2][3][4][5][6] For micro/nano manipulation, the manipulated objects usually have very small sizes, typically ranging from 1 μm to 1 mm, and are difficult to handle. Hence, microgrippers with high precision and dexterity are essential for micro/nano manipulation.…”