2007
DOI: 10.1016/j.tsf.2006.11.198
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Determination of band offsets in a-Si:H/c-Si heterojunctions from capacitance–voltage measurements: Capabilities and limits

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Cited by 40 publications
(25 citation statements)
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“…This leads to the conclusion that the high conductance of the c-Si samples comes from the interface. Indeed, due to the band mismatch between c-Si and a-Si:H, an electron rich inversion layer can exist in c-Si at the interface, as already suggested from capacitance versus voltage measurements [5]. When the a-Si:H layer is etched the inversion layer also disappears so that both G a-Si:H and G int are suppressed, and the equivalent circuit (Fig.…”
Section: Discussionmentioning
confidence: 65%
“…This leads to the conclusion that the high conductance of the c-Si samples comes from the interface. Indeed, due to the band mismatch between c-Si and a-Si:H, an electron rich inversion layer can exist in c-Si at the interface, as already suggested from capacitance versus voltage measurements [5]. When the a-Si:H layer is etched the inversion layer also disappears so that both G a-Si:H and G int are suppressed, and the equivalent circuit (Fig.…”
Section: Discussionmentioning
confidence: 65%
“…As was shown by Gudovskikh et al [4], due to the presence of the inversion layer on the a-Si:H(n)/c-Si(p) heterostructure, it is not possible to determine the diffusion voltage from the C −V measurement of such structure. Therefore, we carried out the simulation study using the ASA program to confirm or reject the presence of inversion layer in the studied samples.…”
Section: Capacitance-voltage Measurementsmentioning
confidence: 99%
“…In the same way, the method applied to (n) a-Si:H / (p) c-Si structure leads to underestimated values for ΔE C . For the latter N/p structure, a critical study of the C-V intercept method has been performed [63]. By changing the conduction band offset value in the calculations (all other parameters being constant) it has been shown that there are two reasons that explain the underestimated values obtained for the band offset.…”
Section: Application To the A-si:h/c-si Systemmentioning
confidence: 99%
“…The intercept voltage of the C-V method reflects the potential drop of the depleted region in the c-Si layer, and does not account for the two additional potential drops in a-Si:H and in the strong inversion layer in c-Si. This is why, when increasing the band offset the intercept voltage of the C-V method saturates at a value close to the potential drop in the depleted region of c-Si and does not increase linearly as does V d [63]. So far, the theoretical considerations and calculations did not take account of interface states that do exist at the a-Si:H/c-Si interface.…”
Section: Application To the A-si:h/c-si Systemmentioning
confidence: 99%