Design, modeling, and characterization of a MEMS electrothermal microgripper

Wang, Zhenlü; Shen, Xuejin; Chen, Xiaoyang

doi:10.1007/s00542-014-2404-4

Cited by 45 publications

(19 citation statements)

References 17 publications

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“…Also, novel materials and cost-effective microfabrication methods would provide a significant opportunity for development. Electrothermal actuators are compatible with the standard IC and MEMS fabrication technologies, e.g., PolyMUMPs [23,66,95], MetalMUMPs [46,72,94], SUMMiT V [65,83], post-CMOS, SOI, and even fabrication of MEMS actuators directly on PCB [18]. Typical planar deposition techniques are used for microfabrication.…”

Section: Discussionmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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Section: Discussionmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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“…Among the 7 unknown constants in (8), λ n is obtained from (11) and all others are defined according to only one constant C hn (17). This constant can be calculated by introducing the initial distribution of temperature:…”

Section: Actuator Electrothermal Responsementioning

confidence: 99%

“…This design, firstly introduced in 1992 [2], is being widely exploited during the last two decades especially in MEMS applications [3,4,5,6,7,8] due to its obvious advantages which pushed research towards ameliorating the design and the performance of the actuator.…”

Section: Introductionmentioning

confidence: 99%

Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator

Hussein

Tahhan

Moal

et al. 2016

J. Micromech. Microeng.

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In this paper, we develop original analytical electro-thermal and thermo-mechanical models for the U-shaped electrothermal actuator. Dynamics of the temperature distribution and displacement are obtained as a direct relationship between the system dimensions, material properties and electrical input. The electrothermal model provides an exact solution of the hybrid PDEs that describe the electrothermal behavior for each of the actuator's three connected arms. The solution is obtained using a new calculation method that allows representing an integrable function by an hybrid infinite sum of sine and cosine functions. Displacement at the actuator's tip is then calculated using a quasistatic model based on the superposition and virtual works principles. Obtained temperature and displacement solutions are then discussed and compared with finite element method (FEM) simulations via ANSYS and experimental results. Comparisons showed good agreement making the proposed modeling a reliable alternative which paves the way for improving the design and optimizing the dimensions of U-shaped micro-actuators.

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“…Many advantages can be cited with respect to other kinds of actuators [2]. Its high output force with a wide range of displacement, the repeatability and long life time [3], the small footprint and simple design, the tolerance to working conditions (dust, moisture...) and the compliance with standard MEMSbased fabrication processes, all of those are advantages that make the U-shaped actuator an attractive solution for many applications in MEMS [4]- [8].…”

Section: Introductionmentioning

confidence: 98%

Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator

Hussein

Moal

Bourbon

et al. 2015

2015 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)

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The dynamic behavior of a U-shaped electrothermal actuator is investigated in this paper based on experimental findings and FEM simulations. Few previous works are found in the literature that have addressed the dynamic response of Ushaped actuators. A lack of data on the transient displacement of the actuator in the heating and cooling cycles is noted.Experiments are made in order to characterize the dynamic response of the actuator. The actuators are micro-fabricated on doped SOI wafers and the displacement is recorded with a high speed camera. FEM simulations are in good agreement with the experimental findings. Simulations and experiments show that the shape of displacement follows evolution of the temperature distribution inside the actuator. The influence of the dynamic behavior on the control of the actuator is finally discussed.

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Design, modeling, and characterization of a MEMS electrothermal microgripper

Cited by 45 publications

References 17 publications

Review of Electrothermal Actuators and Applications

Review of Electrothermal Actuators and Applications

Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator

Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator

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