Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator

Hussein, Hussein; Tahhan, Aref; Moal, Patrice Le; Bourbon, Gilles; Haddab, Yassine; Lutz, Philippe

doi:10.1088/0960-1317/26/2/025010

Cited by 33 publications

(18 citation statements)

References 27 publications

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“…To date, a good amount of MEMS analysts postulate that heat loss by convection is either negligible and therefore unaccounted for in their analyses [19], or that the heat lost by convection may be assumed as a boundary condition with a constant convection coefficient irrespective of the spatial distribution of surface temperature [6]. Another theory is that the heat lost by convection on the microscale tends to be negligible compared to that lost by conduction to the substrate [20][21][22][23][24][25][26].…”

Section: Analytical Modellingmentioning

confidence: 99%

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

et al. 2021

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Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid–structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal–electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

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Section: Analytical Modellingmentioning

confidence: 99%

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

et al. 2021

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“…Moreover, the coupling between the heat transfer problem and the large folding motion requires re-meshing of the surrounding environment every iteration, which adds extra complexity to the simulation. The FE models have also been used to study electro-thermal actuators for micro-electromechanical systems (MEMS) [35], [36], [37]. Because typical electrothermal actuators fabricated with MEMS produce only small deformations, the simulations do not need to re-mesh the thermal boundary making the FE simulations appropriate for MEMS devices.…”

Section: Related Workmentioning

confidence: 99%

“…This assumption holds as long as the system we study is small and the convection is not significant. For most devices fabricated with MEMS process, this is a valid assumption [35], [36]. In the remainder of this subsection, we will introduce how to calculate the model parameters based on the system geometry and the material properties to effectively capture the heat transfer between the origami and the surrounding environment.…”

Section: A Step 1: Solving the Heat Transfer Problem In Origamimentioning

confidence: 99%

Rapid Multi-Physics Simulation for Electro-Thermal Origami Systems

Zhu,

Filipov

2021

Preprint

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Electro-thermally actuated origami provides a novel method for creating 3-D systems with advanced morphing and functional capabilities. However, it is currently difficult to simulate the multi-physical behavior of such systems because the electro-thermal actuation and large folding deformations are highly interdependent. In this work, we introduce a rapid multi-physics simulation framework for electro-thermal origami robotic systems that can capture: thermo-mechancially coupled actuation, inter panel contact, heat transfer, large deformation folding, and other complex loading applied onto the origami. Comparisons with finite element simulations validate the proposed framework for capturing origami heat transfer with different system geometries, materials, and surrounding environments. Verification against physical electro-thermal micro origami further demonstrates the validity of the proposed model. Simulations of more complex origami patterns and a case study for origami optimization are provided as application examples to show the capability and efficiency of the model. The framework provides a novel simulation tool for analysis, design, control, and optimization of active origami robotic systems, pushing the boundary for feasible morphing and functional capability.

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“…In each subsystem of discrete actuator, U-shaped electrothermal actuators are used in order to ensure the switching function (closing and opening of S2 and S3 clamp) and to drive and hold the moving part in the second stable position (shuttle in subsystem S1). The dimensions of the U-shaped electrothermal actuator are chosen based on the modeling and FEM simulations [37] in order to provide the required performance in terms of force and displacement. The final dimensions of the actuators are shown in figure 12.…”

Section: U-shaped Electrothermal Actuatorsmentioning

confidence: 99%

Design and fabrication of novel discrete actuators for microrobotic tasks

Hussein¹,

Bouhadda²,

Mohand-Ousaid³

et al. 2018

Sensors and Actuators A: Physical

Self Cite

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This paper presents a compliant monolithic multistable actuator which is able to switch its moving part between several stable positions linearly in one dimensional direction. The number of stable positions can be increased by extending the range of displacement of the moving part. The transition in each step of displacement is made to the nearest stable position in the direction of motion. Upward and downward steps are made by a specific sequence of moving, using a bistable module, opening and closing two internal clamps which are actuated by U-shaped electrothermal actuator using three subsystems. The principle and the design of each subsystem in the discrete acruator, fabrication process and experimental results are presented. The fabricated prototypes of the discrete actuator showed a proper functioning. The mean achieved displacement is 120.67±0.08 µm over 12 upward steps with a mean step of 10.06 µm, which is very close to the designed performance.

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Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator

Cited by 33 publications

References 27 publications

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Rapid Multi-Physics Simulation for Electro-Thermal Origami Systems

Design and fabrication of novel discrete actuators for microrobotic tasks

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