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The function and performance of MEMS are affected by the output ability of the displacement and force of microactuators. The lateral deflection of cascaded V-shaped electrothermal actuators is modelled as a triple, statically indeterminate problem. An iteration algorithm is set up to calculate the output displacement and typical forces in anchors. The calculated results of this model agree well with our own simulation results as well as with the experimental and calculated results in the literature, and we conclude that the model is credible. The paper also discusses the effects of the structure parameters and temperature increments on the displacement production ability. Clear differences were found between single and cascaded V-shaped electrothermal actuators. For the former, the maximum deflection takes place in a 0.04 rad beam angle, while for the latter the beam angle is 0.19 rad. For both types of actuators, the deflection is unrelated to the beam thickness. The displacement of the cascaded V-shaped electrothermal actuator is proportional to the temperature increment and beam length, but is inversely proportional to the beam width. Experiments on the output ability of cascaded V-shaped electrothermal actuators validated the calculated and simulation results.

This paper reports a series of studies on the lubricant properties, elastohydrodynamic film thickness, and coefficients of friction of several commercially available ester base stocks, i.e., diisooctyl phthalate (DIOP), diisodecyl phthalate (DIDP), diisotridecyl phthalate (DITDP), diisooctyl sebacate (DOS), diisotridecyl sebacate (DTDS), trihydroxymethylpropyl trioleate (TMPTO), and pentaerythritol tetraoleate (PETO). The results include densities and viscosities from 303 to 398 K, and elastohydrodynamic lubricant film thicknesses and friction in the boundary, mixed and full-film lubrication regimes measured at several temperatures, loads, and speeds. These ester base stocks have different lubrication abilities owing to their chain lengths, geometric configurations, and molecular rigidity. This study provides quantitative insight into the use of ester-based lubricants for low friction through the entire lubrication regime (boundary to full film) by utilization of suitable type and size of the ester base stocks.