Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator

Hussein, Hussein; Moal, Patrice Le; Bourbon, Gilles; Haddab, Yassine; Lutz, Philippe

doi:10.1109/aim.2015.7222642

Cited by 6 publications

(9 citation statements)

References 27 publications

(33 reference statements)

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“…Previously, there have been some experimental and numerical studies on the behavior of multiple physical fields for the MEMS actuators (Alwan and Aluru, 2009; Azman et al., 2017; Chen et al., 2002). Although most of MEMS material is fabricated by polysilicon (Dellaert and Doutreloigne, 2014; Hussein et al., 2015; Kumar and Sharma, 2014), CDM can still be reasonably used into MEMS material. According to the applications of CDM, almost all materials can be applied to damage mechanics, such as metals (Cheng and Li,2020;Fan et al.,2020), polymers (Din et al., 2018), elastomers (Andriyana et al., 2015), composites (Fang et al., 2017), and concrete (Wu et al., 2020).…”

Section: Development Of Creep Damage Model For Microelectromechanical...mentioning

confidence: 99%

“…For example, a MEMS thermal actuator modeled and simulated by Dellaert and Doutreloigne (2014) was simplified to a 1 D structure to calculate the temperature profile and the resulting displacement based on a developed electro-thermo-mechanical model. Hussein et al. (2015) investigated the dynamic behavior of a U-shaped electrothermal actuator based on experimental findings and FEM simulations.…”

Section: Introductionmentioning

confidence: 99%

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Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Jia-xing

2021

International Journal of Damage Mechanics

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Effective numerical analysis is significant for the optimal design and reliability evaluation of MEMS, but the complexity of multi-physical field couplings and irreversible damage accumulation in long-term performance make the analysis difficult. In the present paper, the continuum damage mechanics method is used to develop a creep damage model and conduct long-term performance analysis for MEMS thermal actuators with coupled thermo-mechanical damage behavior. The developed damage model can make a connection between the material deterioration due to microstructure changes and the macroscopic responses (the change of thermo-mechanical performance or structure failure). The numerical simulations of coupled thermo-mechanical behavior in long-term performance are implemented using the finite element method, which is validated through comparison with previous literature. The numerical results demonstrate that the proposed damage model and numerical method can provide effective assessment in the long-term performance of MEMS thermal actuators.

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Section: Development Of Creep Damage Model For Microelectromechanical...mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Jia-xing

2021

International Journal of Damage Mechanics

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“…A solution for the unknown constant in (18) is presented in the following using a novel calculation method to present an integrable function by a sum of hybrid sine and cosine functions. In order to calculate the values of the constants C h , C c , C f , ϕ h , ϕ c and ϕ f that correspond to λ n = λ, we multiply the first row in (18) by C h A h sin(λx + ϕ h ), the second row by C c A c sin(λx + ϕ c ) and the third row by C f A f sin(λx + ϕ f ) and integrate the result over the length of the actuator:…”

Section: Actuator Electrothermal Responsementioning

confidence: 99%

Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator

Hussein

Tahhan

Moal

et al. 2016

J. Micromech. Microeng.

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In this paper, we develop original analytical electro-thermal and thermo-mechanical models for the U-shaped electrothermal actuator. Dynamics of the temperature distribution and displacement are obtained as a direct relationship between the system dimensions, material properties and electrical input. The electrothermal model provides an exact solution of the hybrid PDEs that describe the electrothermal behavior for each of the actuator's three connected arms. The solution is obtained using a new calculation method that allows representing an integrable function by an hybrid infinite sum of sine and cosine functions. Displacement at the actuator's tip is then calculated using a quasistatic model based on the superposition and virtual works principles. Obtained temperature and displacement solutions are then discussed and compared with finite element method (FEM) simulations via ANSYS and experimental results. Comparisons showed good agreement making the proposed modeling a reliable alternative which paves the way for improving the design and optimizing the dimensions of U-shaped micro-actuators.

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“…The motion of electro-thermal (E-T) actuator is usually divided into the out-plane and in-plane motion which exists in the U-shaped [1][2][3], V-shaped [4][5][6] and Z-shaped [4] thermal actuator. Compared with other kinds of actuators such as electrostatic [7], piezoelectric [8] ones, etc, the thermal actuator is more attractive due to its capability of larger driving force and tip displacement [9].…”

Section: Introductionmentioning

confidence: 99%

“…Given the application of the optical switch and the three drawbacks mentioned above, some work has been done in our research. Firstly, a finite element method (FEM) model, which is still the most accurate model in the electro-thermal actuator [1][2][3][4][5], and the improved gradient descent method are proposed to calculate the pushing force in the U-shaped actuator. Secondly, a hybrid algorithm containing GA and PSO is utilized in the optimization.…”

Section: Introductionmentioning

confidence: 99%

Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch

Chen¹,

Wang²,

Cao³

et al. 2021

J. Micromech. Microeng.

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In this paper, a novel optimization method, in which composed of the genetic algorithm, particle swarm optimization (GA–PSO) and improved gradient descent algorithm, are used to conduct a double-objective optimization for the U-shaped actuator. In the procedure of optimization, two objectives, i.e. force and displacement, and four main sizes are utilized. Before, the deep reactive-ion etch (DRIE) technology is applied to the fabrication of the U-shaped actuator. When different voltages are applied on the actuator, the displacement obtained from numerical calculation always shows a good agreement with that from experiment by edge detection algorithm. Similar phenomenon can be also seen when an external force supplied by the nanoindentation system FemtoTools in the experiment is loaded on the actuator. Based on the validated simulation model of the U-shaped actuator, the improved gradient descent method ensures its displacement very close to 50 µm (target displacement) while the GA–PSO algorithm is used to maximize the output force. In this procedure, the hybrid optimization method implemented by Matlab is incorporated into ANSYS simulation. Preliminary analysis shows that the displacement and force of the particles in each iteration concentrate together with the iteration growing. Fine convergence, whose velocity only depends on the number of particle in the algorithm, is also found in each optimization. Furthermore, the optimized actuators have homologous value of the size variables. At 15 V voltage, the displacement and largest output force of the U-shaped actuator are 2 mN and 50.1 µm, respectively. Finally, an actuator with 30% improvement of the output force is obtained when the displacement condition is meet. According to the optimization result and further parametric scanning simulation analysis, the design range and fabrication error of the sizes of the U-shaped actuator are obtained.

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Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator

Cited by 6 publications

References 27 publications

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Dynamic electro-thermo-mechanical modelling of a U-shaped electro-thermal actuator

Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch

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