Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

Gu-Stoppel, Shanshan; Janes, Joachim; Quenzer, Hans-Joachim; Hofmann, Ulrich; Kaden, D.; Wagner, Bernhard; Benecke, W.

doi:10.1109/transducers.2013.6627311

Cited by 7 publications

(6 citation statements)

References 8 publications

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“…The resonance frequencies of axes are 25 kHz and 560 Hz, respectively and projects images with a 640 × 480 resolution. Gu-Stoppel et al presented a gimbal-less stage with three degrees of freedom granted by four PZT-clad cantilevers [131]. The torsion modes resonate at 28.6 kHz and the piston mode at 21 kHz.…”

Section: Piezoelectrically Actuated Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

397

175

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Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

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Section: Piezoelectrically Actuated Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

397

175

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“…But the scan angle still needs to be improved. The factor, which limited the micromirrors to achieve larger scan angles, is the mechanical stability of polysilicon, of which the springs and bars of micromirrors consists, as shown in [10] and [11]. Fig.…”

Section: Reference Numbermentioning

confidence: 99%

Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

et al. 2014

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This paper presents designs and fabrication process of two single-axis PZT micromirrors with 1 mm diameter and 1.4 mm × 4 mm apertures, whose frequencies are 60 kHz and 17 kHz, respectively. These micromirrors achieve large optical scan angles of about 40° driven by 10 V rectangular pulses and show high Q-factors of more than 1000. The investigation on the long-term stability of a PZT driven micromirror has detected more than 100 Billion cycles. The combined results of experimental diagnostics and FEM analyses give rise to new designs iteratively leading to a larger deflection and appropriate frequencies, which are currently fabricated

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“…Lead zirconate titanate (PZT) films, which possess high piezoelectric coefficients, are widely utilized as functional layers in many kinds of piezoelectric MEMS mirrors [16][17][18][19][20][21][22]. In recent studies, AlN and Sc-doped AlN (AlScN) films are becoming more and more popular on account of their hysteresis-free characteristics.…”

Section: Introductionmentioning

confidence: 99%

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

Liu

Wang

et al. 2022

Micromachines

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This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical tilt angles of up to 22.6° @ 30 V, with a high resonance frequency of about 8.2 kHz, while the 3 mm mirror reached 48.5° @ 41 V. The mirror with the gimbaled structure exhibited an excellent field of view and good mechanical decoupling. Additionally, a significant improvement in mirror scanning performance was observed in a vacuum (4 Pa), proving that the optical field of view was magnified by more than a factor of 10.

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Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

Cited by 7 publications

References 8 publications

MEMS Laser Scanners: A Review

MEMS Laser Scanners: A Review

Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

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