MEMS Laser Scanners: A Review

Abstract

Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements

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At the intersection of materials, engineering, and new business creation

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Characterization of a Fast Piezoelectric Varifocal MEMS Mirror

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