Design and regularity research of MOCVD heating plate based on experiments and simulations

Li, Jian; Luo, Tiecheng; Wen, Hantao; Deng, Jiajia; Wu, Mingyang; Li, Ya; Wang, Gang; Pei, Yanli

doi:10.1016/j.vacuum.2020.109174

Cited by 7 publications

(2 citation statements)

References 32 publications

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“…These extinct defects can provide strong phonon scattering, resulting in large thermal conductivity suppression [38,39], compromising their performance for LITV applications. Metalorganic chemical vapor deposition (MOCVD) is a widely used technology in the industrial production of epitaxy manufacturers due to its high efficiency and good film-forming uniformity [40,41]. It enables epitaxial growth at higher oxygen partial pressures than MBE or PLD and is more convenient to precisely control the film's chemical composition.…”

Section: Introductionmentioning

confidence: 99%

Laser-induced transverse voltage effect in c-axis inclined La_xSr_1−xTiO₃ thin films prepared by MOCVD

Xie,

Tao,

Zhao

et al. 2024

Nanotechnology

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The light/thermal detector based on the laser-induced transverse voltage (LITV) effect has garnered significant interest for its rapid and broad spectral response. In this study, we prepared the La-doped STO epitaxial thin films on the 12° inclined single crystal LaAlO3(LAO) (100) substrates using our home-designed metal-organic chemical vapor deposition (MOCVD) system. Under the illumination of a 248nm laser, the LITV signals of LaxSr1-xTiO3 films were observed and showed dependence on the La doping level, which can be explained by the changes in the light absorption coefficient, thermal conductivity, and optical penetration depth. The optimized LITV signal was observed with a peak voltage of 23.25V and a decay time of 106ns under the laser power density of 1.0mJ/mm2. The high peak voltage and fast response time of LaxSr1-xTiO3 show great potential in the field of light/thermal detection.

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Section: Introductionmentioning

confidence: 99%

Laser-induced transverse voltage effect in c-axis inclined La_xSr_1−xTiO₃ thin films prepared by MOCVD

Xie,

Tao,

Zhao

et al. 2024

Nanotechnology

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“…Uniformly heating a chuck is essential to construct uniform critical dimensions on the wafer. The etching, deposition rate, physical, electrical, optical properties, and the composition ratio of the deposited material are closely related to the temperature [1][2][3][4]. A small variation of the local temperature causes a large deviation of deposition and etching rates along the wafer.…”

Section: Introductionmentioning

confidence: 99%

Numerical evaluation on surface temperature uniformity of multi-zone and single-zone ceramic heaters with the electrostatic chuck

Lee

2021

J Mech Sci Technol

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The present study aims to numerically analyze the surface temperature uniformity of the multi-zone/single-zone ceramic heaters because the temperature uniformity becomes important in the semiconductor process, in close association with increasing productivity, depending on the power of heaters and the coolant temperature. The extensive simulations were conducted by the commercial code of ANSYS Fluent (V.2020.R2). It was found that the maximum temperature differences between the center of the puck and edge were estimated to be 32 K and 25 K for the circle and ring-type single-zone heaters, respectively. Also, the temperature difference between the center of the puck and the edge increased with the power of the ceramic heater. When using the multi-zone heater, a temperature difference was predicted to be 4.73 K, showing a smaller variation in space. It is concluded that the multi-zone heater can yield a more uniform temperature field in the radial direction.

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Evaluation of surface temperature uniformity of multi-zone ceramic heaters with embedded cooling channels for electrostatic chuck

Jang

Lee

2022

J Mech Sci Technol

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Design and regularity research of MOCVD heating plate based on experiments and simulations

Cited by 7 publications

References 32 publications

Laser-induced transverse voltage effect in c-axis inclined La_xSr_1−xTiO₃ thin films prepared by MOCVD

Laser-induced transverse voltage effect in c-axis inclined La_xSr_1−xTiO₃ thin films prepared by MOCVD

Numerical evaluation on surface temperature uniformity of multi-zone and single-zone ceramic heaters with the electrostatic chuck

Evaluation of surface temperature uniformity of multi-zone ceramic heaters with embedded cooling channels for electrostatic chuck

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Design and regularity research of MOCVD heating plate based on experiments and simulations

Cited by 7 publications

References 32 publications

Laser-induced transverse voltage effect in c-axis inclined La x Sr1−x TiO3 thin films prepared by MOCVD

Laser-induced transverse voltage effect in c-axis inclined La x Sr1−x TiO3 thin films prepared by MOCVD

Numerical evaluation on surface temperature uniformity of multi-zone and single-zone ceramic heaters with the electrostatic chuck

Evaluation of surface temperature uniformity of multi-zone ceramic heaters with embedded cooling channels for electrostatic chuck

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Product

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Laser-induced transverse voltage effect in c-axis inclined La_xSr_1−xTiO₃ thin films prepared by MOCVD

Laser-induced transverse voltage effect in c-axis inclined La_xSr_1−xTiO₃ thin films prepared by MOCVD