Design and modeling of a MEMS pico-Newton loading/sensing device

Samuel, B. A.; Desai, Amit; Haque, M. Shamsul

doi:10.1016/j.sna.2005.11.018

Cited by 27 publications

(15 citation statements)

References 12 publications

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“…For example, a customized test-bed is developed with a gap between which the specimen is placed [52]. One end of the test bed is fixed and the other is attached to a customized stage used to apply displacements using a piezoactuator [53]. The force is deduced by observing the deflection of the freestanding folded beams (with known stiffness) in situ an SEM [ Fig.…”

Section: Characterizing the Mechanics Of One-dimensional Nanostructuresmentioning

confidence: 99%

The Evolving Role of Experimental Mechanics in 1-D Nanostructure-Based Device Development

2010

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Future generations of transistors, sensors, and other devices maybe revolutionized through the use of onedimensional nanostructures such as nanowires, nanotubes, and nanorods. The unique properties of these nanostructures will set new benchmarks for speed, sensitivity, functionality, and integration. These devices may even be self-powered, harvesting energy directly from their surrounding environment. However, as their critical dimensions continue to decrease and performance demands grow, classical mechanics and associated experimental techniques no longer fully characterize the observed behavior. This perspective examines the evolving role of experimental mechanics in driving the development of these new devices. Emphasis is placed on advances in experimental techniques for comprehensive characterization of size effects and their coupling, as well as assessment of device-level response.

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Section: Characterizing the Mechanics Of One-dimensional Nanostructuresmentioning

confidence: 99%

The Evolving Role of Experimental Mechanics in 1-D Nanostructure-Based Device Development

2010

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“…Recently, novel nanoscale sensing approaches were suggested including the use of carbon nanotubes (CNTs) as transducers (Stampfer et al 2006), mainly owing to their high sensitivity to strain (Cao et al 2003;Minot et al 2003). The use of post-buckled beams (Samuel et al 2006) and devices utilizing mechanical amplification mechanisms were also reported to assist in capturing nanoscale forces and displacements.…”

Section: Introductionmentioning

confidence: 99%

A MEMS nano-extensometer with integrated de-amplification mechanism

2011

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Experimental exploration of strained nanostructures, such as nanowires and bio-molecules, is essential for understanding their properties. However, the ability to apply and to quantify nanometer displacements is challenging. We present a novel MEMS nano-extensometer with integrated actuation and compliant de-amplification mechanism allowing the accurate characterization of stretched nanostructures. A feasibility study was followed by fabrication and characterization of the device. The deamplified displacement was registered via optical microscopy and was processed using an improved digital image correlation algorithm to achieve nanometer measurement accuracy. Using our technique, nanoscale displacement can be determined by means of simple imaging tools. This was demonstrated by stretching suspended single wall carbon nanotubes.

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“…More recently, several researchers 10,24,27,32,40 have developed MEMS based actuating/sensing devices for in-situ mechanical testing of nanostructures within a SEM or a TEM. These devices comprise novel actuating mechanisms, e.g., thermal actuator 32,41 and electrostatic comb drive 10,27 integrated with novel sensing capabilities, e.g., capacitive sensing, 27 guided cantilever beams in series along with micro-fabricated gaps 24,40 and a compliant displacement amplifier V-beam 32 on a single MEMS platform. While AFM based techniques are struggling with the application of classical mechanics with reasonable assumptions of boundary conditions and accuracy of measured cantilever deflection, the MEMS-based techniques are struggling with their manufacturing complexity, force/displacement resolutionthat can be achieved, and alignment of nanostructures with the loading direction.…”

Section: Introductionmentioning

confidence: 99%

A novel device for in-situ nanomechanics of 1-D nanostructures

Prakash

Kaul

Park

et al. 2011

JOM

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How would you… …describe the overall significance of this paper? The development of the in-situ test and characterization device enables the testing and characterization of mechanical properties of nanostructures, including biological materials, during high resolution nanoscale imaging. The availability of this versatile instrumentation will lead to the development of novel experiments at the nanoscale; results of these experiments will provide fundamental information about nanomechanics in nanostructured materials. …describe this work to a materials science and engineering professional with no experience in your technical specialty? The manuscript describes an insitu nanomechanical test and characterization device that takes advantage of the advanced visualization, nanomanipulation and nanopositioning capabilities of a finite element scanning electron microscope, and utilizes a highly sensitive three-plate capacitive transducer to make high-resolution displacement and force measurements in individual nanostructures. …describe this work to a layperson? Researchers all over the world are involved in investigating multi-scale mechanics of advanced nanoengineered materials and systems, including hybrid organic/inorganic structures, functional materials, high performance fibers, novel materials for energy, hard and soft tissues, to name a few. For these studies, insitu characterization of mechanical behavior at multiple length scales is essential, and the development of the nanoscale test and characterization device is expected to contribute greatly to the success and future growth of these technologies. This paper reports the development of an in-situ nanotensilometer that enables highly reliable mechanical tensile testing on individual micro-/nanoscale structures. The device features independent measurement of force and displacement histories in the specimen with nanoNewton force and sub-nanometer displacement resolutions, respectively. Moreover, the device is well suited for in-situ testing of free-standing micro/nanostructures within a high resolution scanning electron microscope, which permits continuous highresolution imaging of the specimen during straining. In order to conduct the nanomechanical tests the ends of the specimen are attached to the probe tips of the device using electron-beam induced deposition. The general capabilities and features of the nanotensilometer are illustrated by presenting results of nanomechanical tensile tests on electrospun polyaniline microfibers.

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Design and modeling of a MEMS pico-Newton loading/sensing device

Cited by 27 publications

References 12 publications

The Evolving Role of Experimental Mechanics in 1-D Nanostructure-Based Device Development

The Evolving Role of Experimental Mechanics in 1-D Nanostructure-Based Device Development

A MEMS nano-extensometer with integrated de-amplification mechanism

A novel device for in-situ nanomechanics of 1-D nanostructures

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