Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source

Abstract

A project on developing a 2.45 GHz microwave ion source based compact ion implanter and plasma diagnostic facility has been taken up by the Central University of Punjab, Bathinda. It consists of a double-wall ECR plasma cavity, a four-step ridge waveguide, an extraction system, and an experimental beam chamber. The mechanical design has been carried out in such a way that both types of experiments, plasma diagnosis and ion implantation, can be easily accommodated simultaneously and separately. To optimize microwave coupling to the ECR plasma cavity, a four-step ridge waveguide is designed. Microwave coupling simulation for the ECR plasma cavity has been performed at different power inputs using COMSOL Multiphysics. An enhanced electric field profile has been obtained at the center of the ECR plasma cavity with the help of a four-step ridge waveguide compared to the WR284 waveguide. The magnetic field distribution for two magnetic rings and the extraction system’s focusing properties have been simulated using the computer simulation technique. A tunable axial magnetic field profile has been obtained with a two permanent magnetic ring arrangement. The dependency of the beam emittance and beam current on accelerating voltages up to 50 kV has been simulated with different ions. It shows that ion masses have a great impact on the beam emittance and output current. This facility has provision for in situ plasma diagnosis using a Langmuir probe and optical emission spectroscopy setups. This system will be used for ion implantation, surface patterning, and studies of basic plasma sciences.

Enhancing the electrochemical performance of TiO2 based material using microwave air plasma treatment with an ECR cavity

“…The ECR plasma cavity design is carried so that its radial ports are utilized as multifunctional ports. As previously reported, the ECR plasma cavity can occupy a higher electric field norm inside it (Swaroop et al, 2021). Therefore, non-resonance plasma production is carried out without permanent magnets for the plasma treatment of the materialistic samples.…”

Design of a Miniaturized Electron Cyclotron Resonance Ion Source for High-Voltage Proton Accelerator

“…The electromagnetic simulation outcomes corresponding to scheme, which involves conventional length waveguide plus transition waveguide, are exhibited in Figures 4a and 5's plan 1 curves. The simulation results about the electric field distribution of the entire system are as follows: when the power is one watt, the microwave energy coupled into the discharge chamber through the microwave window, and a maximum electric field of 1661 V/m can be formed in the discharge chamber, but the highest electric field of the entire microwave system is indeed primarily focused inside the transition waveguide, which leads the plasma to migrate towards the waveguide section and might result in the power blockage [16]. The scattering parameter S11 and the transmission efficiency of the system in the 2-3 GHz frequency range, respectively, are shown as plan 1 curves in parts (a) and (b) of Figure 5.…”

“…The commonly used ridge waveguide has 3-4 segments, and the length of each part is λ g /4, where λ g is the waveguide wavelength for transmitting microwaves. The relationship of each segment of the ridge waveguide is as follows [16,17]:…”

Design and simulation of 2450 MHz microwave cavity for resonance and off-resonance plasma diagnosis in-situ plasma irradiation facility

“…Literature reviews reveal that researchers have focused on engineering solutions to improve microwave coupling [17][18][19][20][21][22]. Miniaturization of ion sources has come about due to the substitution of permanent magnets for electromagnets [23][24][25]. From the literature review discussed above it is found that most of these ion sources are meant to generate moderated charge state ion beams and can be utilized for plasma diagnosis purposes.…”