Design and simulation of 2450 MHz microwave cavity for resonance and off-resonance plasma diagnosis in-situ plasma irradiation facility

Abstract

The microwave plasma diagnosis in-situ irradiation system has been developed at the Central University of Punjab, Bathinda. The final design is achieved by a combination of analytical and simulation methods using CST and Comsol Multiphysics software. Simulations outcome reveals the electric field profile at the center of the microwave plasma chamber is strong and dense. A strong electric field profile inside the microwave cavity has been verified by the confinement of the plasma in the absence of an external magnetic field. The magnetic field profile for the 2450 MHz microwave facility is simulated and confirmed experimentally. Different RF powers and working gas pressures have been used with Langmuir probes to record the plasma signal. As a second stage, we studied the practicality of using a plasma cavity to treat materials with plasma for materials science experiment in plasma environment. This work shows the results of a thorough computational analysis of a microwave plasma source that has been tested in lab.