“…Since then, hydrophilic titanium dioxide materials have attracted attention for many practical applications such as self-cleaning and antifogging materials. TiO 2 thin films can be prepared by numerous techniques such as chemical vapor deposition [2], thermal oxidation of electron beam evaporation [3], ion assisted deposition [4], sol-gel processes [5,6], and sputtering [7,8]. Among these techniques, RF magnetron sputtering method provides more advantages in controlling the microstructure and composition of the films.…”