1996
DOI: 10.1016/s0925-4005(97)80039-1
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Cross sensitivity and stability of NO2 sensors from WO3 thin film

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Cited by 118 publications
(38 citation statements)
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“…The grains were most sensitive to both NO and NO 2 at sizes of 25 nm, the sensitivity increasing with concentration of the target gas. Cantalini et al [66] produced films of WO 3 of 150 nm thickness. The films were deposited, and then annealed at temperatures of 400, 500 and 600 °C for 1 h. The largest responses to NO 2 gas were found at working temperatures of 200 °C using the film annealed at 500 °C.…”
Section: Advances In Nitrous Oxide Sensorsmentioning
confidence: 99%
“…The grains were most sensitive to both NO and NO 2 at sizes of 25 nm, the sensitivity increasing with concentration of the target gas. Cantalini et al [66] produced films of WO 3 of 150 nm thickness. The films were deposited, and then annealed at temperatures of 400, 500 and 600 °C for 1 h. The largest responses to NO 2 gas were found at working temperatures of 200 °C using the film annealed at 500 °C.…”
Section: Advances In Nitrous Oxide Sensorsmentioning
confidence: 99%
“…[1][2][3] Coatings have been produced by a wide variety of techniques including solgel, [4][5][6] spin-coating, [7] electrochemical deposition, [8] vacuum physical vapour deposition (PVD), [9][10][11][12][13] thermal chemical vapour deposition (CVD) [14,15] and spray pyrolysis. [16][17][18] Solution methods are widely used but can result in film structural and durability constraints.…”
Section: Introductionmentioning
confidence: 99%
“…Metal oxides, like WO3, Co3O4, CeO2, TiO2, Al2O3, SnO2 and ITO, are commonly used gas sensing materials in sensors for the NO2 detection. The detection limit of metal oxide semiconductor based NO2 sensors is typically a few dozen ppm [6][7][8][9][10][11][12][13][14]. An advantage of these sensors is their small weight, low cost, short response time, wide range of target gases and long lifetime -whereas a disadvantage is their relatively low sensitivity and selectivity, sensitivity to environmental factors and high energy consumption.…”
Section: Introductionmentioning
confidence: 99%