2010
DOI: 10.1038/ncomms1096
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Creation of a two-dimensional electron gas at an oxide interface on silicon

Abstract: In recent years, reversible control over metal-insulator transition has been shown, at the nanoscale, in a two-dimensional electron gas (2DEG) formed at the interface between two complex oxides. These materials have thus been suggested as possible platforms for developing ultrahigh-density oxide nanoelectronics. A prerequisite for the development of these new technologies is the integration with existing semiconductor electronics platforms. Here, we demonstrate room-temperature conductivity switching of 2DEG n… Show more

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Cited by 168 publications
(141 citation statements)
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“…This has been tried with some success, for instance on silicon, 79 on LSAT and on NdGaO 3 . 80 It however turned out to be difficult to preserve metallicity down to low temperatures.…”
Section: Summary and Perspectivesmentioning
confidence: 99%
“…This has been tried with some success, for instance on silicon, 79 on LSAT and on NdGaO 3 . 80 It however turned out to be difficult to preserve metallicity down to low temperatures.…”
Section: Summary and Perspectivesmentioning
confidence: 99%
“…Since the first methods to epitaxially deposit perovskite thin films on Si were established 4 , the growth process has been carefully optimized 5 and single crystalline layers were fabricated even on large-scale 8 00 substrates 6 . However, the interest in this research field has mainly been motivated by the use of oxides in the electronic domain, such as memory applications 7 , gate dielectrics in field-effect transistors 8 or alloxide electronics 9 . Meanwhile, the steadily improving performance of complementary metal oxide semiconductor (CMOS) technology increases the difficulty to handle inter-or intra-chip data communication by means of electrical wiring 10 because of power constraints in combination with increased bandwidth demands.…”
mentioning
confidence: 99%
“…[1][2][3][4][5][6] This highly conductive 2DEG exists because of a polar discontinuity at the interface of the perovskite oxide crystals resulting from valence mismatch. Moreover, these heterostructures exhibit intriguing physical phenomena and hold potential for novel electronic devices with promising properties including high breakdown voltages and extremely large electron sheet densities.…”
mentioning
confidence: 99%