Corrosion Resistance of Diamond-like Carbon-Coated Aluminum Films

Abstract

The corrosion characteristics of diamond-like carbon (DLC) films, deposited on aluminum film-covered single-crystal silicon substrates were investigated using standard potentiometric methods. The DLC films were deposited by radio frequency (13.56 MHZ) plasma deposition from three different precursors, methane, acetylene, and 1,3 butadiene, with argon or hydrogen as the diluent. A 5 nm thick polysilicon (PS) film was plasma-deposited prior to DLC film deposition to improve adhesion. The measured corrosion current increased with an increase in the hydrogen content in the feed gas mixture and was lowest for the films deposited from butadiene and highest for those deposited from methane. Also, the DLC films deposited at higher gas flow rates and lower rf powers offered better protection against corrosion than those deposited at lower gas flow rates and higher rf powers. Annealing improved the corrosion resistance. The corrosion currents for certain DLC/PS/Al/Si samples were about 15 times smaller than those for polyimide (PI)/Al/Si samples.

Anodic dissolution of diamondlike carbon film-coated type 301 stainless steel

“…A similar variation in the anodic current density with the feed gas flow rate was observed earlier with DLC film-coated aluminum films. 19 Since our measurements indicate that the films deposited at 50 and 20 sccm flow rates were as dense, within experimental error, as those deposited at 120 sccm flow rate, the observed difference in the anodic current density is not due to differences in film density. However, we have indirect evidence that the gas flow rate has a strong influence on the residual stresses in the film.…”

“…Also, as before, 19,20 a 10 nm thick layer of polysilicon (PS), rf plasma-deposited from a mixture of silane and argon, was used between the stainless steel substrates and the DLC films to improve adhesion. Polysilicon was not required to achieve adhesion on the silicon substrates.…”

“…They have the additional benefit of being exceptionally hard, making them ideal for protection of cutting tools. 1 We recently investigated the corrosion resistance of radio frequency (rf) plasmadeposited DLC films on Al surfaces 19 and fluorinated carbon films on stainless steel substrates. 20 The anodic current measured by potentiostatic technique 21,22 was used to characterize the film corrosion resistance.…”

Sliding Wear Behaviour and Corosion Resistance to Ringer’s Solution of Uncoated and DLC Coated X46Cr13 Steel

“…[6][7][8][9]. Moreover, DLC coatings with low defect density offer an excellent protection against corrosion because they are chemically inert and impermeable [10]. At room temperature DLC can resist chemical attack by practically any acid, alkali or organic solvent.…”

Surface modification of diamond-like carbon films with protein via polydopamine inspired coatings

“…It attracted much attention in recent years as protective coatings on tools and other devices due to their physical and chemical properties [1][2][3][4][5][6]. The immobilization of biomolecules onto surfaces is important in many fields of biological and physical sciences, including cell and molecular biology, analytical chemistry, medical diagnostics, tissue engineering, and bioprocess engineering [7][8][9][10][11].…”