1999
DOI: 10.1557/jmr.1999.0287
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Anodic dissolution of diamondlike carbon film-coated type 301 stainless steel

Abstract: The resistance of thin diamondlike carbon (DLC) films to anodic breakdown in aqueous electrolytes was investigated using voltammetry. The films were less than 0.5 mm thick and were deposited on type 301 stainless steel substrates using plasma-assisted chemical vapor deposition (PACVD) from either methane, acetylene, or 1,3-butadiene precursors with argon or hydrogen as diluent. A 10 nm thick polysilicon (PS) film was plasma-deposited prior to DLC film deposition to improve adhesion. The electrolytes used for c… Show more

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Cited by 5 publications
(1 citation statement)
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“…The diamond-like carbon films was deposited on stainless steel substrates using plasma-assisted chemical vapor deposition (PACVD) from either methane, acetylene, or 1,3-butadiene precursors with argon or hydrogen as a dilute [9,10]. Amorphous carbon was created on the stainless steel to lower the friction [11].…”
Section: Introductionmentioning
confidence: 99%
“…The diamond-like carbon films was deposited on stainless steel substrates using plasma-assisted chemical vapor deposition (PACVD) from either methane, acetylene, or 1,3-butadiene precursors with argon or hydrogen as a dilute [9,10]. Amorphous carbon was created on the stainless steel to lower the friction [11].…”
Section: Introductionmentioning
confidence: 99%