2011
DOI: 10.1002/pssa.201083994
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Contactless electrical defect characterization in semiconductors by microwave detected photo induced current transient spectroscopy (MD‐PICTS) and microwave detected photoconductivity (MDP)

Abstract: The contactless electrical characterization techniques MDP and MD‐PICTS will be presented in this paper. Both methods are predestined for defect investigation in a variety of semiconductors. Due to a so far not reached sensitivity, major advantages of MDP are its high spatial resolution and its measurement speed, which allows for two dimensional inline measurements at production speed. Furthermore a versatile numerical tool for simulations of electrical properties of a semiconductor as a function of defect par… Show more

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Cited by 24 publications
(15 citation statements)
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References 25 publications
(26 reference statements)
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“…So far selectable pulse widths of ≥5 µs up to CW at rise and fall times of <3 µs have been demonstrated for LEDs. For laser diodes, up to two orders of magnitude faster rise and fall times with corresponding shorter pulse widths were achieved with technology transferred from similar applications in semiconductor research as in Berger et al (2011). It is obvious that the time resolution of the transient measurement system must be able to account for these very short switching times of the light source.…”
Section: Optical Stimulationmentioning
confidence: 99%
“…So far selectable pulse widths of ≥5 µs up to CW at rise and fall times of <3 µs have been demonstrated for LEDs. For laser diodes, up to two orders of magnitude faster rise and fall times with corresponding shorter pulse widths were achieved with technology transferred from similar applications in semiconductor research as in Berger et al (2011). It is obvious that the time resolution of the transient measurement system must be able to account for these very short switching times of the light source.…”
Section: Optical Stimulationmentioning
confidence: 99%
“…This approach has been proved to be efficient, see for example [16]. The code also includes the following physical effects: radiative, Auger, Shockley Read Hall (SRH), surface and back contact recombinations, carrier trapping on defects via rate equations [6,17], thermionic emission at interfaces [18] and trap assisted tunneling [19,20]. The outputs provide the carriers densities profiles n(x,t) and p(x,t), as well as the electric potential for a given semiconductor stack with respect to depth and time.…”
Section: Simulation Toolmentioning
confidence: 99%
“…Bi-exponential behavior has already been studied in the temporal domain by Maiberg et al [6,23] concluding that a shallow trap defect was competing with a fast recombination mechanism. Following this explanation, we introduced in our code one trap center and one SRH recombination center using rate equations for the defects [6,17]. We situated in a first approximation the energy position of the SRH center at mid-gap.…”
Section: Accepted Manuscriptmentioning
confidence: 99%
“…To measure the effective minority carrier lifetime of cSiTF samples, two different MWPCD setups are chosen. One of these setups was the well‐established WT‐2000, distributed by Semilab Semiconductor Physics Laboratory Co. Ltd ., and the other was the more recently developed characterization tool MDPmap , distributed by Freiberg Instruments GmbH . In both setups, the sample under investigation is excited using a laser pulse.…”
Section: Measurement Setup and Principlementioning
confidence: 99%