Composite Si/C/N powder production by laser induced gas phase reactions

Borsella, E.; Botti, S.; Fantoni, R.; Alexandrescu, R.; Morjan, I.; Popescu, C.; Dikonimos-Makris, T.; Giorgi, R.; Enzo, Stefano

doi:10.1557/jmr.1992.2257

Cited by 52 publications

(15 citation statements)

References 11 publications

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“…Formation of 3-10 nm clusters of Si has been reported by room temperature photolysis of disilane with the output from an ArF excimer laser operating at 193 nm (Jasinski and LeGouses, 1991). Films and particles of several pure metals, and oxide/nonoxide ceramics have been formed via gas-phase reactions driven by lasers (Draper, 1980;Cannon et al, 1981a, b;Ehrlitch, 1981;Bilenchi et al, 1982;Haggerty, 1984;Jervis et al, 1985Jervis et al, , 1987Cauchetier et al, 1987;Gupta et al, 1987;Borsella et al, 1992). Gonsalves et al (1991) reported conversion of a liquid organosilane precursor to intermediate preceramic particles of Si,N,/SiC using a high-power C 0 2 laser.…”

Section: Nanophase Materialsmentioning

confidence: 99%

Aerosol Processing of Materials

Gurav,

Kodas,

Pluym

et al. 1993

Aerosol Science and Technology

379

225

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Recent advances in aerosol generation of materials are reviewed. Gas-to-particle and spray processes (spray pyrolysis) for powder generation and various routes for film generation are discussed from the experimental and theoretical perspectives. The range of materials generated by these routes has increased in recent years to include fullerenes and ceramic superconductors. Many metals and various oxide and nonoxide ceramics have also been added to the list of materials generated by gas-phase routes. Established aerosol routes such as vapor condensation have found widespread applications for generation of nanophase materials. The formation of quantum dots via aerosol approaches has also been demonstrated. The theoretical understanding of gas-to-particle conversion routes has advanced to include the finite rate of particle fusion or sintering occurring after collisions of particles. The modeling of spray pyrolysis systems has provided insight into the control of particle morphology and reactor design. In this review, these recent developments in aerosol generation of powders and films via gas-phase and spray routes are discussed with an emphasis on the material chen~istries involved and the synthesis of nanophase materials.

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Section: Nanophase Materialsmentioning

confidence: 99%

Aerosol Processing of Materials

Gurav,

Kodas,

Pluym

et al. 1993

Aerosol Science and Technology

379

225

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“…Most of the studies deals with powders prepared by thermally activated [1][2][3][4][5] or laser-induced 6-8 decomposition of organosilazanes. Silicon carbonitride particles were also obtained by laser irradiation of different gas mixtures: SiH 4 -C 2 H 4 -NH 3 , 9-10 SiH 4 -͑CH 3 ͒ 2 NH, [11][12][13] SiH 4 -CH 3 NH 2 -NH 3 . 14,15 In comparison ''SiCN'' coatings have been less studied.…”

Section: Introductionmentioning

confidence: 99%

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Bendeddouche

Berjoan

Bêche³

et al. 1997

Journal of Applied Physics

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High Seebeck effects from conducting polymer: Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) based thin-film device with hybrid metal/polymer/metal architecture APL: Org. Electron. Photonics 5, 238 (2012) High Seebeck effects from conducting polymer: Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) based thin-film device with hybrid metal/polymer/metal architecture Appl. Phys. Lett. 101, 173304 (2012) Response to "Comment on 'Silver/silicon dioxide/silver sandwich films in the blue-to-red spectral regime with negative-real refractive index'" [Appl. Phys. Lett. 101, 156101 (2012)] Appl. Phys. Lett. 101, 156102 (2012) On the determination of the glass forming ability of AlxZr1−x alloys using molecular dynamics, Monte Carlo simulations, and classical thermodynamics J. Appl. Phys. 112, 073508 (2012) Enhanced photoanode properties of epitaxial Ti doped α-Fe2O3 (0001) thin films Appl.Chemical bonding and local order around the different atoms of thick amorphous SiC x N y deposits ͓0.03рx/(xϩy)р0.67͔ prepared with chemical vapor deposition at 1000-1200°C using TMS-NH 3 -H 2 have been investigated using x-ray photoelectron spectroscopy ͑XPS͒, Raman spectrometry, Fourier transform infrared spectrometry ͑FT-IR͒, electron energy loss spectroscopy ͑EELS͒ and 29 Si magic-angle spinning nuclear magnetic resonance spectrometry ͑MAS-NMR͒. XPS analyses have shown that the main bonds are Si-C, Si-N, and C-C, and have suggested the existence of C-N bonds. According to Raman analyses and complementary FT-IR absorption of thin films, the coatings are nonhydrogenated. Si, C and N atomic chemical environments are more complicated than in a mixture of pure Si 3 N 4 -SiC phases. The examination of the Si KL 2,3 L 2,3 line shapes recorded by XPS have allowed one to state the existence of Si(C 4Ϫn N n ) units. Mixed coordination shells around silicon have been confirmed by EELS analyses. Additionally, FT-IR reflection analyses have proved that Si is both bonded with N and C. Indirect indication has been obtained owing to the 29 Si MAS-NMR analyses of powders. Raman analyses have been conclusive to assume that C-C bonds correspond to a mixed sp 3 Ϫsp 2 carbon configuration linked with Si(C 4Ϫn N n ) tetrahedra with 0рnр4.

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“…26 TiC, 27 Fe and iron carbides, 28 carbon, 29 MoS 2 , 30 CN x , 31 Al 2 O 3 , 32 and nanocomposite ternary Si-C-N powders 33 were also prepared by CO 2 laser driven pyrolysis. Photolytic (UV excitation) LCVD is also capable of generating ultrafine powders such as nanoparticles containing both iron and carbon 34 and tungsten nanoparticles.…”

Section: Laser Assisted Chemical Vapor Depositionmentioning

confidence: 99%

Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications

et al. 2003

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Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects -such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO 3 ) -are presented and compared. WO 3 nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO 3 nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly, conductivity changes of a thick WO 3 nanoparticle film were detected as it was exposed to test gases (H 2 S, NO 2 , and CO).

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Composite Si/C/N powder production by laser induced gas phase reactions

Cited by 52 publications

References 11 publications

Aerosol Processing of Materials

Aerosol Processing of Materials

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Nanoparticle films made by gas phase synthesis: comparison of various techniques and sensor applications

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