2015
DOI: 10.1016/j.tsf.2014.11.071
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Comparative study about Al-doped zinc oxide thin films deposited by Pulsed Electron Deposition and Radio Frequency Magnetron Sputtering as Transparent Conductive Oxide for Cu(In,Ga)Se 2 -based solar cells

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Cited by 13 publications
(4 citation statements)
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“…After the temperature of the deposition surface is raised to 250 °C the CIGS absorber is deposited up to a thickness of about 1.6 µ m, monitored by an IR pyrometer [15]. The solar cells are then completed with a 100 nm thick CdS buffer layer grown by chemical bath deposition followed by 50 nm of undoped ZnO and 250 nm of Al:ZnO both grown by RF-sputtering [28]. The solar cell devices defined as "standard cells" throughout the paper are grown on soda-lime glass sheets coated with a Si 3 N 4 blocking layer and a 0.5 µm thick Mo contact.…”
Section: Methodsmentioning
confidence: 99%
“…After the temperature of the deposition surface is raised to 250 °C the CIGS absorber is deposited up to a thickness of about 1.6 µ m, monitored by an IR pyrometer [15]. The solar cells are then completed with a 100 nm thick CdS buffer layer grown by chemical bath deposition followed by 50 nm of undoped ZnO and 250 nm of Al:ZnO both grown by RF-sputtering [28]. The solar cell devices defined as "standard cells" throughout the paper are grown on soda-lime glass sheets coated with a Si 3 N 4 blocking layer and a 0.5 µm thick Mo contact.…”
Section: Methodsmentioning
confidence: 99%
“…Besides, the PED method maintains the stoichiometry of the target materials in the deposited samples and thus permits the formation of high-quality samples. In the PED method, instead of photons, highly energetic electrons are focused on the target surface in order to ablate material having even large bandgap energy like SiO 2 [9][10][11]. Although a large number of studies had already been reported in the literature on the structural and physical properties of ZnO thin films, only few studies reported the deposition of the undoped ZnO thin film by PED method [12][13][14].…”
Section: Introductionmentioning
confidence: 99%
“…12 Highly promising optoelectronic properties aside, in terms of abundance and cost, zinc oxide-based alternatives are among the foremost potential replacement TCO materials. Dense thin lms of such materials can be deposited using a wide range of techniques including sputtering, 13 chemical vapour deposition, 14 pulsed electron deposition, 15 and pulsed laser deposition. 16 Some of these processes can require annealing steps in excess of 500 C in order to obtain optimal performance.…”
Section: Introductionmentioning
confidence: 99%