2012 IEEE 14th Electronics Packaging Technology Conference (EPTC) 2012
DOI: 10.1109/eptc.2012.6507142
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Chip package interaction (CPI): Thermo mechanical challenges in 3D technologies

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Cited by 22 publications
(6 citation statements)
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“…The sub-model provided results at the corner C4 bump region for BEOL fracture (ULK fracture or delamination). The most significant stress in BEOL layers is in the normal (through-thickness) direction as described in [9], [12]. The results are summarized in the following subsections.…”
Section: B Simulationmentioning
confidence: 97%
See 1 more Smart Citation
“…The sub-model provided results at the corner C4 bump region for BEOL fracture (ULK fracture or delamination). The most significant stress in BEOL layers is in the normal (through-thickness) direction as described in [9], [12]. The results are summarized in the following subsections.…”
Section: B Simulationmentioning
confidence: 97%
“…The die, UF, substrate and ring attach adhesive incorporated temperature dependent CTE values. Material properties for the die BEOL were calculated based on averaging the actual USG, Low-K and ELK stack-up as described in [9]. The UF, ring attach adhesive and substrate moduli values were derived from the respective material's time-temperature master curves and were each represented in ANSYS by a multi-term Prony Series and a Williams-Landel-Ferry shift function.…”
Section: Simulation Modelmentioning
confidence: 99%
“…For each configuration from figure 3, three tensile loads, 3 shear loads and I thermal load where simulated in order to calculate the orthotropic equivalent thermal and mechanical properties: Young's moduli Ell, E22, E33; shear moduli G12, G23, G31; Poisson's ratios VIZ, V23, V31 and thermal expansion coefficients CXI, CXz and CX3. For more details about the method used to calculate the equivalent properties see [3]. Figure 3.…”
Section: Packaging Effectmentioning
confidence: 99%
“…Then, these temperature changes cause thermo-mechanical stresses and warpage inside the 3D-IC package, due to the mismatch in thermal expansion coefficient (CTE) and Young's modulus between the constituent materials of the package. Thus, the thermo-mechanical reliability of the 3D-[C packages is one of the major concerns [3][4].…”
Section: Introductionmentioning
confidence: 99%
“…During their processing or due to the application of power during their operating time, the IC packages are subjected to temperature changes or gradients. These temperature changes makes the materials with different Coefficient of Thermal Expansion (CTE) to expand or contract at different rates inducing thermo-mechanical stresses and increasing the risk of cracks or delamination at the interfaces of the IC-package [1][2]. Therefore, accurate CTE measurements are of great importance for reliability assessment of the packages.…”
Section: Introductionmentioning
confidence: 99%