“…Silicon, as the standard foundry substrate, has been developed as mature surface trap substrate since 2010. [ 18 ] Many electrical and optical components, e.g., trench capacitor, [ 19 ] digital‐to‐analog converter (DACs), [ 20 ] waveguide, [ 21 ] grating coupler, [ 21 ] and photon detectors, [ 22 ] have been monolithically integrated into Si traps. However, standard Si substrates have high RF loss tangent, which need proper RF shielding design [ 18,19,23 ] and a thick layer of dielectric (up to 10 μm) as insulator to achieve a low trap capacitance.…”