Chemical Vapor Deposition Synthesis of Graphene over Sapphire Substrates

Abstract

Graphene grown with less grain boundaries, larger grain sizes and transfer‐free feature by chemical vapor deposition (CVD) is of significant importance to fulfill practical applications. Sapphire has readily emerged as an ideal substrate for graphene growth owing to its relatively low cost, good mechanical strength and physical/chemical stability under CVD conditions. In this minireview, recent advance in the CVD preparation of graphene over sapphire substrates is summarized. The graphene growth on epitaxial metal (111) film derived from c‐plane sapphire and direct fabrication over sapphire are respectively discussed. Application sectors of graphene/sapphire hybrid materials are further reviewed. Finally, perspectives on the synthesis of graphene over sapphire are given.

Graphene‐Based Microwave Circuits: A Review

“…and mechanical stress, which further degrade the electrical characteristics of graphene. [26,32,33] Therefore, growth on insulating substrates is intensely researched.…”

“…The transfer step from Cu or other metallic surfaces also introduces additional chemical dopants and mechanical stress, which further degrade the electrical characteristics of graphene. [ 26,32,33 ] Therefore, growth on insulating substrates is intensely researched.…”

“…The crystalline metal layer makes seamless coalescence of the individual graphene flakes from different nucleation sites possible. Reproduced with permission [32]. Copyright 2021, Wiley-VCH.…”

Новый Метод Изображения Микрообъектов В Синхротронном Излучении С Использованием Нанофокусировки И Томографии

“…Тем не менее широко используемые в электронике подложки из этих кристаллов могут содержать поры (SiC) или газовые включения (Al 2 O 3 ), размеры которых уменьшились до субмикронной или нанометровой величины. Свойства наногетероструктур, выращиваемых методами эпитаксии, или графена, получаемого в результате термодеструкции поверхности SiC [1] или осаждения на сапфире [2], зависят от совершенства подложек. Это предъявляет высокие требования к методам диагностики.…”

A new method for synchrotron radiation x-ray imaging of micro-objects using nanofocusing optics and tomography

“…However, substrates made from these crystalline materials, which are used widely in electronics, may contain pores (SiC) or gaseous inclusions (Al 2 O 3 ) with their sizes reduced to submicrometer or nanometer scales. The properties of epitaxial nanoheterostructures or graphene produced by thermal decomposition of SiC [1] or deposition on sapphire [2] depend on the quality of substrates. This imposes strict requirements on diagnostic methods.…”