1996
DOI: 10.1143/jjap.35.4995
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Characterization of Niobium-Doped Lead Titanate Thin Films

Abstract: Lead titanate ( PbTiO3) thin films were deposited on silicon substrates covered with platinum by reactive sputtering using a single multicomponent-type target at high temperatures (around 500° C). Small chips of metallic niobium were incorporated into the target for doping purposes. Samples analyzed in this study were fabricated in such a way that the molar concentration of niobium was kept at 0, 1, 2, 3, or 4%. X-ray diffraction (XRD) patterns showed that samples doped with niobium te… Show more

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Cited by 8 publications
(5 citation statements)
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“…But the fact is that several parallel projects, within the IDPC, USP, and even in the Instituto Federal de São Paulo (IFSP) were born from that interaction, such as the electromagnetic suspension for a fourth generation of CFVADs (38)(39)(40)(41)(42)(43)(44)(45)(46)(47)(48)(49)(50)(51).…”
Section: Introductionmentioning
confidence: 99%
“…But the fact is that several parallel projects, within the IDPC, USP, and even in the Instituto Federal de São Paulo (IFSP) were born from that interaction, such as the electromagnetic suspension for a fourth generation of CFVADs (38)(39)(40)(41)(42)(43)(44)(45)(46)(47)(48)(49)(50)(51).…”
Section: Introductionmentioning
confidence: 99%
“…Imitating PLT or PCLT [2,3], we chose samarium as dopant, and successfully prepared Sm-doped PbTiO 3 (PST) thin film on p-type Si(1 1 1) substrate [4]. Because Pb is highly reactive with Si and easily diffuses into Si substrate [5], we want to suppress the diffusion at the interface between PbTiO 3 and Si substrate by using a buffer layer, such as SrTiO 3 [6] and CeO 2 [7] or Pt [8], which plays an important role in the growth of high quality ferroelectric thin film. Bi 2 Ti 2 O 7 exhibits no ferroelectricity or piezoelectricity.…”
Section: Introductionmentioning
confidence: 99%
“…4 Thus, various buffer layers have been proposed for obtaining a good ferroelectric-Si interface, such as SrTiO 3 , CeO 2 , Pt and SiO 2 . [5][6][7][8] Bi 2 Ti 2 O 7 exhibits no ferroelectricity or piezoelectricity. But it has a relatively high dielectric constant and good insulation.…”
Section: Introductionmentioning
confidence: 99%