2008
DOI: 10.1063/1.2987421
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Characterization of n-n Ge/SiC heterojunction diodes

Abstract: In this paper we investigate the physical and electrical properties of germanium deposited on 4H silicon carbide substrates by molecular beam epitaxy. Layers of highly doped and intrinsic germanium were deposited at 300 and 500 °C and compared. Current-voltage measurements reveal low turn-on voltages. The intrinsic samples display ideality factors of 1.1 and a reverse leakage current of 9×10−9 A/cm2, suggesting a high quality electrical interface. X-ray diffraction analysis reveals the polycrystalline nature o… Show more

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Cited by 9 publications
(7 citation statements)
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“…With a surface roughness of only 6.7 nm the polycrystalline layer could easily be polished to a flat from here. Figure 1c shows an n-type 300 nm layer that has been grown at only 200 o C, compared to the rest that have been grown at 500 o C. A trade off exists in selecting deposition temperature, as we first reported for 100 nm layers 12 . The raised deposition temperatures give polycrystalline layers, with low resistance but poor surface morphology, forming good contacts.…”
Section: A Physical Analysismentioning
confidence: 82%
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“…With a surface roughness of only 6.7 nm the polycrystalline layer could easily be polished to a flat from here. Figure 1c shows an n-type 300 nm layer that has been grown at only 200 o C, compared to the rest that have been grown at 500 o C. A trade off exists in selecting deposition temperature, as we first reported for 100 nm layers 12 . The raised deposition temperatures give polycrystalline layers, with low resistance but poor surface morphology, forming good contacts.…”
Section: A Physical Analysismentioning
confidence: 82%
“…The surface roughness values (R q ) over this area for all the 300 nm heterojunction layers are summarised in Table I. The thinnest heterojunction layer is shown in Figure 1b, where the layer was grown at high temperature to a thickness of only 100 nm. We previously carried out a full analysis on this layer 12 , citing the Stranski Krastanov growth mode as the reason why the large islands form, with gaps almost down to the SiC between them. By comparing this image with Figure 1a, we can see that there is substantial improvement in the layer quality as it gets thicker.…”
Section: A Physical Analysismentioning
confidence: 99%
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“…On the other hand, silicon carbide (SiC) is another wide bandgap semiconductor material (up to 3.26 eV) with high thermal conductivity, high breakdown voltage and fast switching speed, making it an attractive candidate for high power and high frequency devices [13,14]. SiC is also known for its excellent mechanical properties and good chemical stability [15,16]. Most of these properties are related to the crystalline structure and the many varieties of polytypes presented by SiC, where the most studied ones are the 3C-SiC, 4H-SiC and 6H-SiC polytypes [14].…”
Section: Introductionmentioning
confidence: 99%
“…17,18 On the other hand, silicon carbide (SiC) is a wellknown material for its extraordinary mechanical and physical properties such as hardness, abrasive wear resistance, chemically inert, and high thermal conductivity. 19,20 There are many polytypes, but the technologically important ones are 3C-, 4H-, and 6H-SiC. In general, 3C-SiC is known as a low-temperature polytype, while 4H-and 6H-SiC as hightemperature polytypes.…”
mentioning
confidence: 99%