Characterization and fabrication of MOEMS-based diffractive optical switching elements

Verheggen, J.; Panaman, Ganesh; Castracane, James

doi:10.1117/12.647806

Cited by 3 publications

(3 citation statements)

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“…This measurement revealed a static, downward displacement of $1.3 mm at the centre of the ruling (see figure 7) [13]. Optical experiments showed no movement at the centre of the rulings, but movement was observed at the ruling ends.…”

Section: Testing and Characterizationmentioning

confidence: 97%

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Optimization of diffractive MEMS for optical switching

Verheggen

Khan-Raja

Castracane

2007

Journal of Experimental Nanoscience

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Diffractive Micro-Electro-Mechanical Systems (D-MEMS) have enjoyed increased attention in the fields of communication, spectroscopy, projection display, and maskless lithography. Redirecting an optical signal into predefined angles, precisely balancing this optical signal, inherent wavelength filtering capability and high switching speed are some of the advantages over other optical MEMS. D-MEMS based on customized IC fabrication processes are being used to assemble system-level architectures for integration into mainstream circuitry. The goal of this work is to improve the optical performance while minimizing the power consumption and operational voltage. Operational characteristics of new D-MEMS have achieved a reduction of the optical switching voltage to 2V at a 6.5V bias. Structural modifications through variation in ruling/top-electrode width and spacing have been studied. An alternative structural material, polyimide, is being optimized for further decreasing the operating voltage of the D-MEMS devices.

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Section: Testing and Characterizationmentioning

confidence: 97%

“…Because of differences in residual stress buckling of active and passive rulings, the initial condition shows a state in between optical switching. Optical switching is achieved at 11 V ramp at 13 V bias [13].…”

Section: Testing and Characterizationmentioning

confidence: 99%

Optimization of diffractive MEMS for optical switching

Verheggen

Khan-Raja

Castracane

2007

Journal of Experimental Nanoscience

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“…[97,98] The movable ribbon may not maintain its flat profile due to the bending of reflective ribbons during the modulation process, hence significantly affecting the grating efficiency. Then some research works have been conducted to optimize the beam parameters to reduce this effect induced by the non-flat deflection, [99,100] and the shape of the beam could also be modified to achieve better tuning behavior. [101] Figure 11(b) indicates a novel device design where the micromirrors are suspended with soft flexures that can be pulled towards the substrate when a voltage is supplied to the flexures and the underlying electrode.…”

Section: Mems Gratings With Tunable Profilementioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

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Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

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Development of a Micromechanical Grating Optical Modulator for Optical Network

Yuan

Yan

et al. 2009

J. Lightwave Technol.

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Characterization and fabrication of MOEMS-based diffractive optical switching elements

Cited by 3 publications

References 0 publications

Optimization of diffractive MEMS for optical switching

Optimization of diffractive MEMS for optical switching

MEMS gratings and their applications

Development of a Micromechanical Grating Optical Modulator for Optical Network

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