1997
DOI: 10.1002/1521-396x(199705)161:1<111::aid-pssa111>3.0.co;2-u
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Characterisation of the Interface States between Amorphous Diamond-Like Carbon Films and (100) Silicon

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Cited by 42 publications
(19 citation statements)
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“…Therefore, the frequency dependent electrical characteristics are very important according to accuracy and reliable result. The characterization of interface states in MIS structure has become a subject of very intensive research in the last decade, and a number of workers have suggested various ways of characterization [5,[14][15][16][17][18][19]. The forward and reverse bias C-f and G/x-f measurements give the important information about the energy distribution of the interface states of the MIS structure.…”
Section: Introductioncontrasting
confidence: 85%
“…Therefore, the frequency dependent electrical characteristics are very important according to accuracy and reliable result. The characterization of interface states in MIS structure has become a subject of very intensive research in the last decade, and a number of workers have suggested various ways of characterization [5,[14][15][16][17][18][19]. The forward and reverse bias C-f and G/x-f measurements give the important information about the energy distribution of the interface states of the MIS structure.…”
Section: Introductioncontrasting
confidence: 85%
“…However, this saturation is different at low and intermediate frequencies and temperatures especially in the depletion and accumulation regions, which is due to the series resistance (R s ) of the device, interface states (N ss ), interfacial insulator layer, and surface charges [6][7][8][9][10][11][12][13]. The performance and reliability of these devices are especially dependent on the formation barrier height at the M/S interface, R s of devices, doping concentration, and N ss [6][7][8][9][10][11][12][13][14][15][16]. In addition, the change in temperature has very important effects on the determination of such devices' parameters [16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…Due to the presence of oxide layer and two surface-charge regions, MOS physics is more complicated than semiconductor surface physics. The importance in Si technology, the semiconductor/ insulator (Si/SiO 2 ) interface and defects on its neighborhood have been extensively studied in the past four decades [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%